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Ultra-high resolution optical coherence tomography for encapsulation quality inspection

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Abstract

We present the application of ultra-high resolution optical coherence tomography (UHR-OCT) in evaluation of thin, protective films used in printed electronics. Two types of sample were investigated: microscopy glass and organic field effect transistor (OFET) structure. Samples were coated with thin (1–3 μm) layer of parylene C polymer. Measurements were done using experimental UHR-OCT device based on a Kerr-lens mode locked Ti:sapphire femtosecond laser, photonic crystal fibre and modified, free-space Michelson interferometer. Sub-micron resolution offered by the UHR-OCT system applied in the study enables registration of both interfaces of the thin encapsulation layer. Complete, volumetric characterisation of protective layers is presented, demonstrating possibility to use OCT for encapsulation quality inspection.

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Authors and Affiliations

  1. Optoelectronics and Measurement Techniques Laboratory, University of Oulu, P.O. Box 4500, 90014, Oulu, Finland

    J. Czajkowski, T. Fabritius, R. Śliż, T. Prykäri, R. Myllylä & G. Jabbour

  2. Department of Molecular Physics, Technical University of Łódź, 90-924, Łódź, Poland

    J. Ulański & T. Marszałek

  3. Institute of Mechanical Engineering, Technical University of Łódź, 90-924, Łódź, Poland

    M. Gazicki-Lipman & A. Nosal

  4. Solar and Photovoltaics Engineering Research Center, King Abdullah University of Science and Technology, Thuwal, Jeddah, 23955-6900, Saudi Arabia

    E. Alarousu & G. Jabbour

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  1. J. Czajkowski
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  2. T. Fabritius
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  3. J. Ulański
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  4. T. Marszałek
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  6. A. Nosal
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  7. R. Śliż
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  8. E. Alarousu
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  9. T. Prykäri
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  10. R. Myllylä
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Correspondence to J. Czajkowski.

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Czajkowski, J., Fabritius, T., Ulański, J. et al. Ultra-high resolution optical coherence tomography for encapsulation quality inspection. Appl. Phys. B 105, 649–657 (2011). https://doi.org/10.1007/s00340-011-4699-5

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  • DOI: https://doi.org/10.1007/s00340-011-4699-5

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