Abstract
We have carried out a systematic investigation of laser ablation plume interactions in resonant infrared matrix-assisted pulsed laser evaporation. The laser source utilized in this study was a mid-infrared OPO capable of dual sequential ns pulses with adjustable delay ranging from 1 to 100 μs. This unique capability enabled us both to probe the ablation plume with a second laser pulse, and to effectively double the laser fluence. The primary ablation target used for this study consisted of poly(methyl methacrylate) dissolved in a binary mixture of methanol and toluene. Both the critical thermodynamic and optical properties of the binary mixture were determined and used to interpret our results. We found that deposition rates associated with single pulse irradiation tracks with the optical absorption coefficient in the spectral range from 2,700 to 3,800 nm. In the case of dual sequential pulses, discrepancies in this trend have been linked to the rate of change in the optical absorption coefficient with temperature. The influence of fluence on deposition rate was found to follow a sigmoidal dependence. Surface roughness was observed to have a diametrically opposed trend with pulse delay depending on whether the OH or CH vibrational mode was excited. In the case of CH excitation, we suggest that the rougher films are due to the absorbance of the second pulse by droplets within the plume containing residual solvent which leads to the formation of molecular balloons and hence irregularly shaped features on the substrate.
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Acknowledgments
D. M. Bubb acknowledges support from Awards CMMI-0727713 and CMMI-0922946 from the National Science Foundation. We are grateful to L. Zhigilei and J. M. Fitzgerald for useful conversations.
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O’Malley, S.M., Schoeffling, J., Jimenez, R. et al. The influence of wavelength, temporal sequencing, and pulse duration on resonant infrared matrix-assisted laser processing of polymer films. Appl. Phys. A 117, 1343–1351 (2014). https://doi.org/10.1007/s00339-014-8553-6
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DOI: https://doi.org/10.1007/s00339-014-8553-6