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Sub-wavelength micromachining of silica glass by irradiation of CO2 laser with Fresnel diffraction

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Abstract

We investigated a simple and productive micromachining method of silica glass by ablation using a TEA CO2 laser (10.6 μm) with a spatial resolution down to sub-wavelength scale. The silica glass was irradiated by the TEA CO2 laser light through a copper grid mask with square apertures of 20×20 μm2 attached to the silica glass surface. After the irradiation, circular holes with a diameter of several μm were formed on the silica glass surface at the centers of the apertures due to the Fresnel diffraction effect. The minimum diameter of the holes was 3.4 μm. The characteristics of the micromachining are discussed based on the electric field distributions of the CO2 laser light under the mask using a three-dimensional full-wave electromagnetic field simulation.

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References

  1. R. Martinez Vazquez, R. Osellame, M. Cretich, M. Chiari, C. Dongre, H.J.W.M. Hoekstra, M. Pollnau, H. van den Vlekkert, R. Ramponi, G. Cerullo, Anal. Bioanal. Chem. 393, 1209 (2009)

    Article  Google Scholar 

  2. F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa, Y. Xu, X. Chen, Opt. Lett. 35, 282 (2010)

    Article  ADS  Google Scholar 

  3. S. Nikumb, Q. Chen, C. Li, H. Reshef, H.Y. Zheng, H. Qiu, D. Low, Thin Solid Films 477, 216 (2005)

    Article  ADS  Google Scholar 

  4. H. Niino, Y. Kawaguchi, T. Sato, A. Narazaki, R. Kurosaki, Appl. Surf. Sci. 253, 8287 (2007)

    Article  ADS  Google Scholar 

  5. T. Sato, R. Kurosaki, A. Narazaki, Y. Kawaguchi, H. Niino, Appl. Phys. A (2010). doi:10.1007/s00339-010-5790-1

  6. T. Makimura, S. Mitani, Y. Kenmotsu, K. Murakami, Appl. Phys. Lett. 85, 1274 (2004)

    Article  ADS  Google Scholar 

  7. T. Makimura, H. Miyamoto, Y. Kenmotsu, K. Murakami, Appl. Phys. Lett. 86, 103111 (2005)

    Article  ADS  Google Scholar 

  8. V.K. Sysoev, V.I. Masychev, B.P. Papchenko, S.Ya. Rusanov, A.A. Yakovlev, N.P. Glukhoedov, Inorg. Mater. 39, 532 (2003)

    Article  Google Scholar 

  9. L.Ç. Özcan, V. Tréanton, R. Kashyap, L. Martinu, IEEE Photonics Technol. Lett. 19, 459 (2007)

    Article  ADS  Google Scholar 

  10. D. Yuan, S. Das, J. Appl. Phys. 101, 024901 (2007)

    Article  ADS  Google Scholar 

  11. H. Qi, T. Chen, L. Yao, T. Zuo, Opt. Lasers Eng. 47, 594 (2009)

    Article  Google Scholar 

  12. H. Qi, X. Wang, T. Chen, X. Ma, T. Zuo, Microsyst. Technol. 15, 1027 (2009)

    Article  Google Scholar 

  13. H. Klank, J.P. Kutter, O. Geschke, Lab. Chip 2, 242 (2002)

    Article  Google Scholar 

  14. R. Braun, R. Nowak, P. Hess, H. Oetzmann, C. Schmidt, Appl. Surf. Sci. 43, 352 (1989)

    Article  ADS  Google Scholar 

  15. P.E. Dyer, J. Mackay, C.D. Walton, Opt. Commun. 240, 391 (2004)

    Article  ADS  Google Scholar 

  16. K. Ke, E.F. Hasselbrink, A.J. Hunt, Anal. Chem. 77, 5083 (2005)

    Article  Google Scholar 

Download references

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Authors and Affiliations

  1. Graduate School of Information Science and Electrical Engineering, Kyushu University, 744, Motooka, Nishi-ku, Fukuoka, 819-0395, Japan

    K. Okazaki, D. Nakamura & T. Okada

  2. Institute of Applied Physics, University of Tsukuba, 1-1-1, Tennoudai, Tsukuba, Ibaraki, 305-8573, Japan

    S. Torii, T. Makimura & K. Murakami

  3. National Institute of Advanced Industrial Science and Technology, 1-1-1, Higashi, Tsukuba, Ibaraki, 305-8565, Japan

    H. Niino

  4. Graduate School of Medical Sciences, Kyushu University, 3-1-1, Higashi-ku, Fukuoka, 812-8582, Japan

    A. Takahashi

Authors
  1. K. Okazaki
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  2. S. Torii
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  3. T. Makimura
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  4. H. Niino
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  5. K. Murakami
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  6. D. Nakamura
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  7. A. Takahashi
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  8. T. Okada
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Correspondence to K. Okazaki.

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Okazaki, K., Torii, S., Makimura, T. et al. Sub-wavelength micromachining of silica glass by irradiation of CO2 laser with Fresnel diffraction. Appl. Phys. A 104, 593–599 (2011). https://doi.org/10.1007/s00339-011-6364-6

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  • DOI: https://doi.org/10.1007/s00339-011-6364-6

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