Skip to main content
SpringerLink
Log in

High resolution patterning of sapphire by F2-laser ablation

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

The ablation behavior of single crystalline sapphire with nanosecond laser pulses at 157 nm wavelength is investigated. Ablation rates of about 10 to 100 nm/pulse are obtained at fluences ranging from 1 to 9 J/cm2. At moderate fluences, incubation behavior is observed, i.e. ablation starts after material modification by a number of laser pulses. The ablation can be utilized to fabricate sapphire micro-optics. The capability of creating lenses or gratings on the tip of sapphire fibers is demonstrated. Multilevel diffractive optical elements and high resolution gratings with 1 μm period are fabricated on planar sapphire substrates.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. R.W. Waynant, S. Oshry, M. Fink, Appl. Opt. 32, 390 (1993)

    Article  ADS  Google Scholar 

  2. N.M. Fried, Y. Yang, C.A. Chaney, D. Fried, Lasers Med. Sci. 19, 155 (2004)

    Article  Google Scholar 

  3. Y. Zhu, A. Wang, Appl. Opt. 45, 6071 (2006)

    Article  ADS  Google Scholar 

  4. M. Bonetti, P. Calmettes, Rev. Sci. Instrum. 76, 043903 (2005)

    Article  ADS  Google Scholar 

  5. M.R. Arnold, H.R. Kalbitzer, W. Kremer, J. Magn. Reson. 161, 127 (2003)

    Article  ADS  Google Scholar 

  6. H.M. Manasevit, W.I. Simpson, J. Appl. Phys. 35, 1349 (1963)

    Article  ADS  Google Scholar 

  7. R.A. Johnson, P.R. de la Houssaye, C.E. Chang, P.-F. Chen, M.E. Wood, G.A. Garcia, I. Lagnado, P.M. Asbeck, IEEE Trans. Electron Devices 45, 1047 (1998)

    Article  ADS  Google Scholar 

  8. T. Baehr-Jones, A. Spott, R. Ilic, A. Spott, B. Penkov, W. Asher, M. Hochberg, Opt. Express 18, 12127 (2010)

    Article  ADS  Google Scholar 

  9. A. Blatter, M. Maillat, S. Pimenov, G. Shafeevc, A. Simakin, Tribol. Lett. 4, 237 (1998)

    Article  Google Scholar 

  10. R. Kelly, J. Cuomo, P. Leary, J.E. Rothenberg, B. Braren, C. Aliotta, Nucl. Instrum. Methods Phys. Res., Sect. B, Beam Interact. Mater. Atoms 9, 329 (1985)

    Article  ADS  Google Scholar 

  11. J.E. Rothenberg, R. Kelly, Nucl. Instrum. Methods Phys. Res., Sect. B, Beam Interact. Mater. Atoms 1, 291 (1984)

    Article  ADS  Google Scholar 

  12. A. Tam, J.L. Brand, D.C. Cheng, W. Zapka, Appl. Phys. Lett. 55, 2045 (1989)

    Article  ADS  Google Scholar 

  13. D. Ashkenasi, A. Rosenfeld, H. Varel, M. Wähmer, E. Campbell, Appl. Surf. Sci. 120, 65 (1997)

    Article  ADS  Google Scholar 

  14. R. Dreyfus, R. Kelly, R. Walkup, Appl. Phys. Lett. 49, 1479 (1986)

    Article  ADS  Google Scholar 

  15. P.R. Herman, R.S. Marjoribanks, A. Oettl, K. Chen, I. Konovalov, S. Ness, Appl. Surf. Sci. 154, 577 (2000)

    Article  ADS  Google Scholar 

  16. P.E. Dyer, J. Sidhu, J. Opt. Soc. Am. B, Opt. Phys. 3, 792 (1986)

    Article  ADS  Google Scholar 

  17. M. Lapczyna, M. Stuke, Appl. Phys. A 66, 473 (1998)

    Article  ADS  Google Scholar 

  18. S. John, S. Langford, J. Dickinson, Appl. Phys. A 92, 981 (2008)

    Article  ADS  Google Scholar 

  19. P.R. Herman, K.P. Chen, M. Wei, J. Zhang, J. Ihlemann, D. Schäfer, G. Marowsky, P. Oesterlin, B. Burghardt, Proc. SPIE 4274, 149 (2001)

    Article  ADS  Google Scholar 

  20. M. Wiesner, J. Ihlemann, H. Müller, E. Lankenau, G. Hüttmann, Rev. Sci. Instrum. 81, 033705 (2010)

    Article  ADS  Google Scholar 

  21. A. Pedraza, Nucl. Instrum. Methods Phys. Res., Sect. B, Beam Interact. Mater. Atoms 141, 709 (1998)

    Article  ADS  Google Scholar 

  22. D. Ashkenasi, R. Stoian, A. Rosenfeld, Appl. Surf. Sci. 154–155, 40 (2000)

    Article  Google Scholar 

  23. M. Innocenzi, R. Swimm, M. Bass, R. French, A. Villaverde, M. Kokta, J. Appl. Phys. 67, 7542 (1990)

    Article  ADS  Google Scholar 

  24. V.V. Harutunian, V.A. Gevorkian, N.E. Grigorian, G.N. Eritsian, Phys. Status Solidi B 160, K71 (1990)

    Article  ADS  Google Scholar 

  25. P.E. Dyer, S.R. Jackson, P.H. Key, W.J. Metheringham, M.J.J. Schmidt, Appl. Surf. Sci. 96–98, 849 (1996)

    Article  Google Scholar 

  26. J. Zinn, M. Schütte, J. Meinertz, J. Ihlemann, J. Laser Micro Nanoeng. 5, 6 (2010)

    Article  Google Scholar 

  27. T. Fricke-Begemann, J. Li, J. Dou, J. Ihlemann, P. Herman, G. Marowsky, in Proceedings of the Third International WLT-Conference on Lasers in Manufacturing, LIM 2005 (2005), p. 733

    Google Scholar 

  28. F. Wyrowski, J. Opt. Soc. Am. A 7, 961 (1990)

    Article  ADS  Google Scholar 

  29. D. Schäfer, J. Ihlemann, F. Simon, in DOMO 2002. OSA Tech. Digest (2002), p. 149

    Google Scholar 

  30. M. Schulz-Ruhtenberg, J. Ihlemann, J. Heber, Appl. Surf. Sci. 248, 190 (2005)

    Article  ADS  Google Scholar 

  31. P.E. Dyer, R.J. Farley, R. Giedl, D.M. Karnakis, Appl. Surf. Sci. 96–98, 537 (1996)

    Article  Google Scholar 

  32. P. Simon, J. Ihlemann, Appl. Phys. A 63, 505 (1996)

    Article  ADS  Google Scholar 

  33. M.A. Bader, C. Kappel, A. Selle, J. Ihlemann, M.L. Ng, P.R. Herman, Appl. Opt. 45, 6586 (2006)

    Article  ADS  Google Scholar 

  34. D.G. Archer, J. Phys. Chem. Ref. Data 22, 1441 (1993)

    Article  ADS  Google Scholar 

  35. E.R. Dobrovinskaya, L.A. Lytvynov, V. Pishchik, Sapphire Material, Manufacturing, Applications (Springer, Berlin, 2009)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Laser-Laboratorium Göttingen, Hans-Adolf-Krebs-Weg 1, 37077, Göttingen, Germany

    Markus Wiesner & Jürgen Ihlemann

Authors
  1. Markus Wiesner
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Jürgen Ihlemann
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Markus Wiesner.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Wiesner, M., Ihlemann, J. High resolution patterning of sapphire by F2-laser ablation. Appl. Phys. A 103, 51–58 (2011). https://doi.org/10.1007/s00339-011-6347-7

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-011-6347-7

Keywords

Search

Navigation