Abstract
A series of (FeCoNiNbB) x –(SiO2)1−x nano-granular thin films were fabricated by magnetron sputtering with different oblique incidence angles θ. High-resolution transmission electron micrographs show that the films consist of amorphous CoFeM (M = Ni, Nb, B) alloy particles with diameter about 2 nm surrounded by amorphous SiO2 matrix. Excellent soft magnetic properties have been achieved with a variable in-plane uniaxial magnetic anisotropy field H k0, which increases monotonically with θ and x, and decreases with the composition of B in FeCoM. For one typical sample of x=0.63 with θ=30°, H ch and H ce are 4.2 Oe and 5.4 Oe, respectively, ρ reaches 12.5 mΩ cm and 4π M s and H k0 are 5.70 kG s and 92 Oe, respectively, which lead to a high ferromagnetic resonance frequency f r of 2.2 GHz. Based on the analysis of experimental results, two sources for the origin of the magnetic anisotropy, namely anisotropic magnetic coupling and orientation order of atomic pairs, are suggested.
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Zhang, B., Wang, G., Zhang, F. et al. High-frequency FeCoNiNbB–SiO2 nano-granular films with high resistivity and adjustable resonance frequency from 1.3 to 7.8 GHz. Appl. Phys. A 97, 657–661 (2009). https://doi.org/10.1007/s00339-009-5278-z
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DOI: https://doi.org/10.1007/s00339-009-5278-z