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Self-guided glass drilling by femtosecond laser pulses

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Abstract

Straight through-holes of high aspect ratio have been fabricated in glass by femtosecond laser pulses, utilizing unique characteristics of ultrafast lasers such as volumetric multi-photon absorption and nonlinear self-focusing. In this study, interestingly, the drilling process was initiated and progressed in a self-regulated manner, while the laser focus was fixed through the specimen at the neighborhood of the rear surface that was in contact with liquid during the entire drilling process. The deposition of laser energy along the nonlinearly extended focal range and the guided drilling along the pre-defined region are explained based on time-resolved optical transmission and emission measurements.

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Authors and Affiliations

  1. Department of Mechanical Engineering, University of California, Berkeley, CA, 94720-1740, USA

    David J. Hwang, Kuniaki Hiromatsu, Hirofumi Hidai & Costas P. Grigoropoulos

  2. Research Center, AGC ASAHI GLASS CO., LTD., Address 1-1, Suehiro-cho, Tsurumi-ku, Yokohama-shi, Kanagawa, Japan

    Kuniaki Hiromatsu

  3. Department of Mechanical Sciences and Engineering, Tokyo Institute of Technology, Tokyo, 152-8552, Japan

    Kuniaki Hiromatsu & Hirofumi Hidai

  4. Advanced Energy Technologies Department, EETD, Lawrence Berkeley National Laboratory, Berkeley, CA, 94720, USA

    Costas P. Grigoropoulos

Authors
  1. David J. Hwang
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  2. Kuniaki Hiromatsu
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  3. Hirofumi Hidai
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  4. Costas P. Grigoropoulos
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Correspondence to Costas P. Grigoropoulos.

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Hwang, D.J., Hiromatsu, K., Hidai, H. et al. Self-guided glass drilling by femtosecond laser pulses. Appl. Phys. A 94, 555–558 (2009). https://doi.org/10.1007/s00339-008-4973-5

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  • DOI: https://doi.org/10.1007/s00339-008-4973-5

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