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Drilling high aspect ratio holes by femtosecond laser filament with aberrations

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Abstract

A near-infrared femtosecond laser is focused by a 100 mm-focal-length plano-convex lens to form a laser filament, which is employed to drill holes on copper targets. By shifting or rotating the focusing lens, additional aberration is imposed on the focused laser beam, and significant influence is produced on the aspect ratio and cross-sectional shape of the micro-holes. Experimental results show that when proper aberration is introduced, the copper plate with a thickness of 3 mm can be drilled through with an aspect ratio of 30, while no through-holes can be drilled on 3-mm-thickness copper plates by femtosecond laser with minimized aberration. In addition, when femtosecond laser filament with large astigmatism is used, micro-holes that had a length to width ratio up to 3.3 on the cross-section are obtained. Therefore, the method proposed here can be used to fabricate long oval holes with high aspect ratios.

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Acknowledgements

This work was supported by the National Key Research and Development Program (No. 2018YFB0504400).

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Authors and Affiliations

  1. Institute of Modern Optics, Nankai University, Tianjin Key Laboratory of Micro-scale Optical Information Science and Technology, Tianjin, 300350, China

    Manshi Wang, Zhiqiang Yu, Nan Zhang & Weiwei Liu

Authors
  1. Manshi Wang
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  2. Zhiqiang Yu
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  3. Nan Zhang
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  4. Weiwei Liu
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Corresponding author

Correspondence to Nan Zhang.

Additional information

Manshi Wang received her B.S. degree in Physics from Nanjing Normal University, China, in 2019. From 2019 until now, she is pursing a master’s degree in Optical Engineering at Institute of Modern Optics, Nankai University, China. Her research focuses on ultrafast laser processing and laser-induced periodic surface structures.

Zhiqiang Yu received his Bachelor’s degree in Optoelectronic Information Science and Engineering from School of Optoelectronic Engineering, Changchun University of Science and Technology, China, in 2017. From September 2017 to June 2019, he received his M.S. degree in Optical Engineering from Institute of Modern Optics, School of Electronic Information Science and Engineering, Nankai University, China. From September 2019 to the present, he is pursuing a Ph.D. degree in Optical Engineering at Institute of Modern Optics, School of Electronic Information Science and Engineering, Nankai University. Currently, he engages in research on ultrafast optics and its applications.

Nan Zhang receive his Ph.D. degree in Optical Engineering from Nankai University, China, in 2009. From 2009 to 2013, he was a lecturer in Nankai University; from 2013 to present, he is an associate professor in Institute of Modern Optics, Nankai University. His major research field is ultrafast laser-matter interaction, including the ultrafast thermodynamic evolution of femtosecond laser ablation, femtosecond laser induced periodic surface structures, and etc.

Weiwei Liu received his Ph.D. degree in Physics from Laval University, Québec, QC, Canada, in 2005. Since 2007, he has been working as a full professor with Institute of Modern Optics, Nankai University, China. His main research interests include ultrafast laser optics, THz science and technology, and nonlinear optics.

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Wang, M., Yu, Z., Zhang, N. et al. Drilling high aspect ratio holes by femtosecond laser filament with aberrations. Front. Optoelectron. 14, 522–528 (2021). https://doi.org/10.1007/s12200-021-1214-4

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  • DOI: https://doi.org/10.1007/s12200-021-1214-4

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