Abstract
Refractive-index tailoring and morphological evolutions in two different thin film composite systems of gadolinia–silica (Gd2O3:SiO2) and zirconia–silica (ZrO2:SiO2) deposited through reactive electron-beam codeposition processes are discussed in this research paper. For Gd2O3:SiO2 the refractive-index tuning has been achieved from 1.45 to 2.18, whereas in the case of ZrO2:SiO2 the achieved tunable range is from 1.45 to 2.45 in the ultraviolet region. Under certain compositional mixings with lower silica fractions both the systems demonstrated relative microstructural and morphological densifications. Such evolutions were very successfully derived through phase-modulated ellipsometry and atomic force microscopy. The composition-dependent refractive-index tailoring and microstructural densifications have been investigated by adopting Tauc–Lorentz and single-effective-oscillator models. The morphological correlation functions have also very aptly supported such evolutions in these composite films. These experimental results indicate their favourable properties and applicability down to the extreme ultraviolet wavelength region of the electromagnetic spectrum.
Similar content being viewed by others
References
N. Kaiser, Appl. Opt. 41, 3053 (2002)
D. Zhang, S. Fan, Y. Zhao, W. Gao, J. Shao, R. Fan, Y. Wang, Z. Fan, Appl. Surf. Sci. 243, 232 (2005)
H.B. He, H.Y. Hu, Z.P. Tang, Z.X. Fan, J.D. Shao, Appl. Surf. Sci. 241, 442 (2005)
N.K. Sahoo, S. Thakur, M. Senthilkumar, D. Bhattacharyya, N.C. Das, Thin Solid Films 440, 155 (2003)
C.C. Lee, C.L. Tien, J.C. Hsu, Appl. Opt. 41, 2043 (2002)
R. Thielsch, A. Gatto, N. Kaiser, Appl. Opt. 41, 3211 (2002)
T.R. Jensen, J. Warren, R.L. Johnson, Appl. Opt. 41, 3205 (2002)
C.C. Lee, H.C. Chen, C.C. Jaing, Appl. Opt. 44, 2996 (2005)
S.K. Poznyak, D.V. Talapin, A.I. Kulak, Thin Solid Films 405, 35 (2002)
J.P. Cheron, F. Tcheliebou, A. Boyer, J. Vac. Sci. Technol. A 10, 3207 (1992)
N.K. Sahoo, A.P. Shapiro, Appl. Opt. 37, 698 (1998)
H. Zhang, S. Liu, Thin Solid Films 209, 148 (1992)
R. Luo, Appl. Opt. 36, 8153 (1997)
M. Cevro, Thin Solid Films 258, 91 (1995)
H. Sankur, J. DeNatale, W.J. Gunning, Appl. Opt. 30, 495 (1991)
J.S. Chen, S. Chao, J.S. Kao, H. Niu, C.H. Chen, Appl. Opt. 35, 90 (1996)
N.K. Sahoo, A.P. Shapiro, Appl. Opt. 37, 8043 (1998)
B.J. Pond, J.I. DeBar, C.K. Carniglia, T. Raj, Appl. Opt. 28, 2800 (1989)
Y. Tsou, F.C. Ho, Appl. Opt. 35, 5091 (1996)
R.Y. Tsai, M.Y. Hua, Appl. Opt. 35, 5073 (1996)
B.J.H. Stadler, M.J. Oliver, Appl. Phys. 84, 93 (1998)
H. Demiryont, Appl. Opt. 24, 2647 (1985)
S. Chao, C.K. Chang, J.S. Chen, Appl. Opt. 30, 3233 (1991)
J.G. Yoon, H.K. Oh, Y.J. Kwag, J. Korean Phys. Soc. 33, 699 (1998)
R. Laird, A. Belkind, J. Vac. Sci. Technol. A 10, 1908 (1992)
S. Chao, W.H. Wang, M.Y. Hsu, L.C. Wang, J. Opt. Soc. Am. A 16, 1477 (1999)
H. Kobayashi, H. Terui, Appl. Opt. 22, 3121 (1983)
H. Sankur, W.J. Gunning, J. Appl. Phys. 66, 4747 (1989)
N.S. Cluck, H. Sankur, J. Heuer, J. DeNatale, W.J. Gunning, J. Appl. Phys. 69, 3037 (1991)
B.J.H. Stadler, M.J. Oliver, Appl. Phys. 84, 93 (1998)
H. Sankur, W.J. Gunning, J.F. DeNatale, Appl. Opt. 27, 1564 (1998)
A. Feldman, E.N. Farabaugh, NBS Spec. Publ. 697, 122 (1985)
E.N. Farabaugh, A. Feldman, J. Sun, Y.N. Sun, J. Vac. Sci. Technol. A 5, 1671 (1987)
A. Feldman, X. Ying, E.N. Farabaugh, Appl. Opt. 28, 5229 (1989)
A. Feldman, Soc. Photo-Opt. Instrum. Eng. 821, 129 (1987)
A. Feldman, E.N. Farabaugh, R.A. Stempniak, NBS Spec. Publ. 746, 299 (1988)
F. Tcheliebou, A. Boyer, L. Martin, Thin Solid Films 249, 86 (1994)
W.H. Koo, S.M. Jeong, S.H. Choi, H.K. Baik, S.J. Lee, S.M. Lee, J. Vac. Sci. Technol. A 22, 2048 (2004)
A. Feldman, E.N. Farabaugh, W.K. Haller, D.M. Sanders, R.A. Stempniak, J. Vac. Sci. Technol. A 4, 2969 (1986)
A. Belkind, W. Gerristead, Z. Orban, D. Dow, J. Felts, R. Laird, Surf. Coat. Technol. 49, 155 (1991)
A. Belkind, E. Ezell, W. Gerristead, Z. Orban, P. Rafalko, D. Dow, J. Felts, R. Laird, J. Vac. Sci. Technol. A 9, 530 (1991)
X. Wang, H. Masumoto, Y. Someno, T. Hirai, Thin Solid Films 338, 105 (1999)
H. Lee, I.Y. Kim, S.S. Han, B.S. Bae, M.K. Choi, I.S. Yang, J. Appl. Phys. 90, 813 (2001)
A.V. Osipov, F. Schmitt, P. Hess, Thin Solid Films 472, 31 (2005)
B. von Blanckenhagen, D. Tonova, J. Ullmann, Appl. Opt. 41, 3137 (2002)
H. Lee, I.Y. Kim, S.S. Han, B.S. Bae, M.K. Choi, I.S. Yang, J. Appl. Phys. 90, 813 (2001)
Y.B. Park, K.H. Ahn, D.W. Park, J. Mater. Sci. Lett. 22, 1325 (2003)
H.N. Yang, A. Chan, G.C. Wang, J. Appl. Phys. 74, 101 (1993)
Y. Chen, W. Huang, Meas. Sci. Technol. 15, 2005 (2004)
Z.J. Liu, N. Jiang, Y.G. Shen, Y.W. Mai, J. Appl. Phys. 92, 3559 (2002)
C.H. Zhang, Z.J. Liu, K.Y. Li, Y.G. Shen, J.B. Luo, J. Appl. Phys. 95, 1460 (2004)
A. Mannelquist, N. Almquist, S. Fredriksson, Appl. Phys. A 66, S891 (1998)
Y.P. Zhao, H.N. Yang, G.C. Wang, T.M. Lu, Appl. Phys. Lett. 68, 3063 (1996)
S.H. Wemple, M. DiDomenico, Phys. Rev. B 3, 1338 (1971)
M.A. Gaffar, A.A. El-Fadl, S.B. Anooz, Cryst. Res. Technol. 38, 798 (2003)
S.H. Mohamed, O. Kappertz, J.M. Ngaruiya, T. Niemeier, R. Drese, R. Detemple, M.M. Wakkad, M. Wuttig, Phys. Stat. Solidi A 201, 90 (2004)
Y. Utsugi, Phys. Stat. Solidi B 212, R9 (1999)
N.M. Ravindra, V.K. Srivastava, Infrared Phys. 19, 605 (1979)
H. Finkenrath, Infrared Phys. 28, 363 (1988)
J.S. Seeley, R. Hunneman, A. Whatley, Appl. Opt. 20, 31 (1981)
Author information
Authors and Affiliations
Corresponding author
Additional information
PACS
42.79.Wc; 78.66.-w; 78.20.Ci; 61.16.Ch; 42.70.-a;68.55.-a; 68.35.Bs; 81.15.Ef
This article https://link.springer.com/article/10.1007/s00339-007-4148-9 has been retracted by the Editor-in-Chief, following the Committee on Publication Ethics (COPE) guidelines on self-plagiarism. The article has significant overlap with six other journal publications by the same authors:
· N.K. Sahoo, S. Thakur, and R.B. Tokas, Applied Optics 45, 3243 (2006)
· N.K. Sahoo, S. Thakur, and R.B. Tokas, App. Surf. Sci. 253, 618 (2006)
· N.K. Sahoo, R.B. Tokas, and S. Thakur, App. Surf. Sci. 253, 1787, (2006)
· N.K. Sahoo, S. Thakur, and R.B. Tokas, J. Phys. D 39, 2571 (2006)
· N.K. Sahoo, S. Thakur, R.B. Tokas, A. Biswas, and N.M. Kamble, App. Surf. Sci. 253, 3455 (2007)
· N.K. Sahoo, S. Thakur, R.B. Tokas, and N.M. Kamble, App. Surf. Sci. 253, 6787 (2007)
An erratum to this article is available at http://dx.doi.org/10.1007/s00339-017-1001-7.
About this article
Cite this article
Sahoo, N., Thakur, S., Tokas, R. et al. RETRACTED ARTICLE: Refractive-index tailoring and morphological evolutions in Gd2O3–SiO2 and ZrO2–SiO2 composite thin films. Appl. Phys. A 89, 711–719 (2007). https://doi.org/10.1007/s00339-007-4148-9
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00339-007-4148-9