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Improvement of the PLD process assisted by RF plasma for AlN growth

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Abstract

The pulsed-laser-deposition (PLD) method is particularly well suited for the growth of oxide thin films, but in the case of other compounds, such as nitrides, PLD presents some limitations which are mainly due to the low reactivity of nitrogen in comparison with oxygen. A possible way to overcome this problem is to increase the reactivity of the constituent species, via ‘plasma assisted-pulsed-laser deposition’. A plasma is coupled to the ablation chamber, in order to increase the density of reactive atomic species, which can be further incorporated in the growing film. This approach is described in this paper as well as the nature, energy, and concentration of the atomic and molecular species in the plasma as determined by various plasma diagnostics. These results are correlated to the growth of thin films in the particular case of the aluminum nitride compound. The composition and structure of the films are studied as a function of the growth conditions, and the positive effects of the additional discharge are evidenced on the film purity and properties. The fundamental problem with the PLD technique, especially with metallic targets, is the production of unwanted droplets that significantly worsen the properties of the films. To eliminate these droplets, a thin film has been grown with an experimental setup using two targets and crossed laser beams which gave positive results.

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References

  1. D.B. Chrisey, G.K. Huber: Pulsed Laser Deposition of Thin Films (Wiley, New York 1994)

  2. P.R. Willmott, J.R. Huber: Rev. Mod. Phys. 72, 315 (2000)

    Article  ADS  Google Scholar 

  3. S.A. Cao, J. Pedraza, L.F. Allard: J. Mater. Res. 10, 54 (1995)

    Article  ADS  Google Scholar 

  4. R.D. Vispute, H. Wu, J. Narayan: Appl. Phys. Lett. 67, 1549 (1995)

    Article  ADS  Google Scholar 

  5. A. Basillais, C. Boulmer-Leborgne, J. Mathias, N. Laidani, A. Laurent, J. Perrière: Appl. Phys. A 71, 619 (2000)

    Article  ADS  Google Scholar 

  6. A. Basillais: PhD Thesis, Université d’Orléans, France (2000)

  7. G.S. Sudhir, H. Fujii, W.S. Wong, C. Kisielowski, N. Newman, C. Dieker, Z. Lilienthal-Weber, M.D. Rubin, E.R. Weber: J. Electron. Mater. 27, 215 (1998)

    Article  ADS  Google Scholar 

  8. V. Craciun, N. Bassim, R.K. Singh, D. Craciun, J. Hermann, C. Boulmer-Leborgne: Appl. Surf. Sci. 186, 288 (2002)

    Article  ADS  Google Scholar 

  9. A.B. Beavitt: Thin Solid Films 1, 69 (1967)

    Article  ADS  Google Scholar 

  10. W.P. Barr: J. Phys. E 2, 1112 (1969)

    Article  ADS  Google Scholar 

  11. H. Dupendant, J.P. Gavigan, D. Givord, A. Liénard, J.P. Rebouillat, Y. Souche: Appl. Surf. Sci. 43, 369 (1989)

    Article  ADS  Google Scholar 

  12. T. Venkatesan, X.D. Wu, R.E. Muenchausen, A. Pique: Mater. Res. Bull. 17, 54 (1992)

    Google Scholar 

  13. N. Cherief, D. Givord, A. Lienard, K. Mackay, O.F.K. McGrath, J.P. Rebouillat, F. Robaut, Y. Souche: J. Magn. Mater. 121, 94 (1993)

    Article  ADS  Google Scholar 

  14. D. Lubben, S.A. Barnett, K. Suzuki, S. Gorbatkin, J.E. Green: J. Vac. Sci. Technol. B 3, 968 (1985)

    Article  Google Scholar 

  15. C. Doughty, A.T. Findikoglu, T. Venkatesan: Appl. Phys. Lett. 66, 1276 (1995)

    Article  ADS  Google Scholar 

  16. H. Sankur, W.J. Gunning, J. DeNatale, J.F. Flintoff: Appl. Phys. Lett. 56, 2475 (1989)

    Google Scholar 

  17. R.F. Xiao, H.B. Liao, X.W. Sun, H.S. Kwok: J. Appl. Phys. 80, 4226 (1996)

    Article  ADS  Google Scholar 

  18. P.R. Willmott, F. Antoni: Appl. Phys. Lett. 73, 1334 (1998)

    Article  Google Scholar 

  19. R.J. Kennedy: Thin Solid Films 214, 223 (1992)

    Article  ADS  Google Scholar 

  20. S. Witanachchi, K. Ahmed, P. Sakthivel, P. Mukherjee: Appl. Phys. Lett. 66, 1469 (1995)

    Article  ADS  Google Scholar 

  21. A. Gorbunov, W. Pompe, A. Sewing, S. Gaponov, A.D. Akhsakhalyan, I.G. Zabrodin, I.A. Kas’kov, E.B. Klyenkov, A.P. Morozov, N.N. Salashchenko, R. Dietsch, H. Mai, S. Völmar: Appl. Surf. Sci. 96–98, 649 (1996)

  22. L. Lambert, F. Grangeon, M. Autric: Appl. Surf. Sci. 138–139, 574 (1999)

  23. T. Thäringen, G. Lippold, V. Riede, M. Lorenz, K.J. Koivusaari, D. Lorenz, S. Mosch, P. Grau, R. Hesse, P. Streubel, R. Szargan: Thin Solid Films 348, 103 (1999)

    Article  ADS  Google Scholar 

  24. N. Materer, R.S. Goodman, S.R. Leone1: J. Appl. Phys. 83, 1917 (1998)

    Article  ADS  Google Scholar 

  25. R.D. Vispute, S. Choopun, R. Enck, A. Patel, V. Talyansky, R.P. Sharma, T. Venkatesan, W.L. Sarney, L.G. Salamanca-Riba, S.N. Andronescu, A.A. Iliadis, K.A. Jones: J. Electron. Mater. 2, 275 (1999)

    Article  ADS  Google Scholar 

  26. J. Hermann, C. Boulmer-Leborgne, D. Hong: J. Appl. Phys. 83, 691 (1998)

    Article  ADS  Google Scholar 

  27. C. Vivien, J. Hermann, A. Peronne, C. Boulmer-Leborgne, A. Luches: J. Phys. D: Appl. Phys. 31, 1263 (1998)

    Article  ADS  Google Scholar 

  28. W.L. Wiese, M.W. Smith, B.M. Miles: Atomic Transition Probabilities, Vol. 1 (NSRDS-NBS 4, Washington 1966)

  29. R.W.B. Pearse, A.G. Gaydon: The Identification of Molecular Spectra, 3rd edn. (Chapman and Hall, London 1965)

  30. A.R. De Souza, M. Digiacomo, J.L.R. Muzart, J. Nahorny, A. Ricard: Eur. Phys. J. Appl. Phys. 5, 185 (1999)

    Article  ADS  Google Scholar 

  31. J. Hermann, C. Boulmer-Leborgne, B. Dubreuil, I.N. Mihailescu: J. Appl. Phys. 71, 5629 (1992)

    Article  ADS  Google Scholar 

  32. D.B. Geohegan: Thin Solid Films 220, 138 (1992)

    Article  ADS  Google Scholar 

  33. A. Basillais, C. Boulmer-Leborgne, J. Mathias, J. Perrière: Appl. Surf. Sci. 186, 416 (2002)

    Article  ADS  Google Scholar 

  34. A.A. Radzig, B.M. Smirnov: Reference Data on Atoms, Molecules and Ions (Springer, Berlin 1985)

  35. B.M. Penetrante, J.N. Bardsley, M.C. Hsiao: Jpn. J. Appl. Phys. 3, 5007 (1997)

    Article  ADS  Google Scholar 

  36. Z.M. Ren, Y.F. Lu, H.Q. Ni, T.Y.F. Liew, B.A. Cheong, S.K. Chow, M.L. Ng, J.P. Wang: J. Appl. Phys. 88, 7346 (2000)

    Article  ADS  Google Scholar 

  37. M. He, N. Cheng, P. Zhou, H. Okabe, J.B. Halpern: J. Vac. Sci. Technol. A 16, 2372 (1998)

    Article  ADS  Google Scholar 

  38. S. Bashkin, J.O. Stoner Jr.: Atomic Energy Levels and Grotrian Diagrams, Vol. 1 (North Holland/American Elsevier, Amsterdam 1975)

  39. K. Dovidenko, S. Oktyabrsky, J. Narayan: J. Appl. Phys. 79, 2439 (1996)

    Article  ADS  Google Scholar 

  40. O. Guillot-Noel, R. Gomez-San Roman, J. Perrière, J. Hermann, V. Craciun, C. Boulmer-Leborgne, P. Barboux: J. Appl. Phys. 80, 1803 (1996)

    Article  ADS  Google Scholar 

  41. A. Tselev, A. Gorbunov, W. Pompe: Rev. Sci. Instrum. 72, 2665 (2001)

    Article  ADS  Google Scholar 

  42. S.V. Gaponov, A.A. Gudkov, B.M. Luskin, V.I. Luchin, N.N. Salashchenko: Sov. Phys. Tech. Phys. 26, 598 (1981)

    Google Scholar 

  43. C. Girault, D. Damiani, C. Champeaux, P. Marchet, J.P. Mercurio, J. Aubreton, A. Catherinot: Appl. Phys. Lett. 56, 1472 (1990)

    Article  ADS  Google Scholar 

  44. K. Deneffe, P. Van Mieghem, B. Brijs, W. Vandervorst, R. Mertens, G. Borghs: Jpn. J. Appl. Phys. 30, 1959 (1991)

    Article  ADS  Google Scholar 

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Authors and Affiliations

  1. GREMI, CNRS UMR 6606, Université d’Orléans, 14 rue d’Issoudun, BP 6744, 45067, Orléans Cedex 2, France

    A. Basillais, R. Benzerga, H. Sanchez, E. Le Menn & C. Boulmer-Leborgne

  2. GPS, CNRS UMR 7588, Universités Paris VII et Paris VI, Tour 23, 2 Place Jussieu, 75251, Paris Cedex 05, France

    J. Perrière

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  1. A. Basillais
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  2. R. Benzerga
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  5. C. Boulmer-Leborgne
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  6. J. Perrière
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Correspondence to C. Boulmer-Leborgne.

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PACS

81.15.Fg; 52.80.Pi; 77.84.Bw

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Basillais, A., Benzerga, R., Sanchez, H. et al. Improvement of the PLD process assisted by RF plasma for AlN growth. Appl. Phys. A 80, 851–859 (2005). https://doi.org/10.1007/s00339-003-2325-z

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  • DOI: https://doi.org/10.1007/s00339-003-2325-z

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