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Characteristics of Ba x Sr 1–x TiO 3 thin films grown by pulsed laser ablation of rotating split targets of BaTiO 3 and SrTiO 3

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Abstract

We have grown heterostructures of BaxSr1-xTiO3(BST)/La0.7Sr0.3MnO3(LSMO) on LaAlO3(LAO) substrates by the pulsed laser deposition method. BST films with x=0.2,0.5,0.7 and 0.8 have been prepared using a novel rotating split-target arrangement. The lattice constant of the BST films is found to vary linearly with Ba/Sr ratio. An excellent cube-on-cube epitaxial relationship of (100)BST||(100)LSMO||(100)LAO has also been obtained. Scanning electron microscopy studies have revealed smooth and crack-free BST films with a uniform grain size of about 100 nm. Dielectric measurements, made with patterned Au top electrodes and conducting LSMO bottom layers, have shown a maximum permittivity of approximately 280 at 5 kHz in BST films with x=0.7. P–E loop analyses of the Ba0.7Sr0.3TiO3 and Ba0.8Sr0.2TiO3 films have yielded remnant polarization values of 1.66 and 1.81μC/cm2, respectively.

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Authors and Affiliations

  1. Vienna University of Technology, Karlsplatz 13, 1040, Wien, Austria

    V. Ruckenbauer

  2. Department of Applied Physics and Materials Research Centre, The Hong Kong Polytechnic University, Hunghom, Kowloon, Hong Kong SAR, China

    F.F. Hau, S.G. Lu, K.M. Yeung, C.L. Mak & K.H. Wong

Authors
  1. V. Ruckenbauer
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  2. F.F. Hau
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  3. S.G. Lu
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  4. K.M. Yeung
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  5. C.L. Mak
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  6. K.H. Wong
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Corresponding author

Correspondence to K.H. Wong.

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PACS

81.15Fg; 68.55Jk; 77.55+f

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Ruckenbauer, V., Hau, F., Lu, S. et al. Characteristics of Ba x Sr 1–x TiO 3 thin films grown by pulsed laser ablation of rotating split targets of BaTiO 3 and SrTiO 3 . Appl. Phys. A 78, 1049–1052 (2004). https://doi.org/10.1007/s00339-003-2154-0

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  • DOI: https://doi.org/10.1007/s00339-003-2154-0

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