Abstract.
Low-threshold field electron emission (FEE) is reported for periodic arrays of micro-tips produced by laser ablation of Si wafers. The best samples show emission at threshold fields as low as 4–5 V/μm for n-type Si substrates and of 1–2 V/μm for p-doped Si substrates, as measured with a flat-screen technique. Auger electron spectroscopy and X-ray electron spectroscopy reveal island-like deviation of the SiO2 stoichiometry on the tip surfaces, with lateral dimensions of less than 100 nm. Microscopic studies using a special field-emission STM show that the emission originates from well-conducting regions of sub-micron size. The experimental data suggest FEE from the tip arrays by a geometric field enhancement of both the individual micro-tip and the narrow conducting channels in the tip body.
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Received: 3 May 2002 / Accepted: 1 July 2002 / Published online: 28 October 2002
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Karabutov, A., Frolov, V., Loubnin, E. et al. Low-threshold field electron emission of Si micro-tip arrays produced by laser ablation . Appl Phys A 76, 413–416 (2003). https://doi.org/10.1007/s00339-002-1715-y
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DOI: https://doi.org/10.1007/s00339-002-1715-y