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Application of high-resolution EFTEM SI in an AEM

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Abstract

In this work we show how energy-filtered imaging can be used to obtain spectrum images of electron energy-loss spectrometric data. Focus is placed on improved energy resolution within these data sets. Using two multilayer samples (GaN/AlN and InP/InAs), we demonstrate the advantages of spectrum-imaging and its extended mapping capabilities. Plasmon-ratio maps are used to quickly create high-contrast material maps with high signal-to-noise ratio, ratio-contrast plots are used to gain optimum settings for the ratio maps, and plasmon-position maps are used to map small shifts of the energy position of bulk plasmon peaks.

Scheme of EELS SI and derived plasman-position map

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Acknowledgements

The authors would like to thank Achim Trampert, Paul Drude Institute for Solid State Electronics Berlin, for providing the GaN/AlN sample. Holm Kirmse, Humbolt University Berlin, is gratefully acknowledged for providing the InAs/InP sample.

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Authors and Affiliations

  1. Institute for Electron Microscopy, Graz University of Technology, Steyrergasse 17, 8010, Graz, Austria

    Bernhard Schaffer, Werner Grogger, Gerald Kothleitner & Ferdinand Hofer

Authors
  1. Bernhard Schaffer
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  2. Werner Grogger
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  3. Gerald Kothleitner
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  4. Ferdinand Hofer
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Correspondence to Bernhard Schaffer.

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Schaffer, B., Grogger, W., Kothleitner, G. et al. Application of high-resolution EFTEM SI in an AEM. Anal Bioanal Chem 390, 1439–1445 (2008). https://doi.org/10.1007/s00216-007-1578-3

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  • DOI: https://doi.org/10.1007/s00216-007-1578-3

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