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Study of dicing mechanism influence on PZT-4H composite performance

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Abstract

Dicing and filling is the most commonly used method to fabricate the piezoelectric composite by replacing part of the piezoelectric ceramics with the polymer. The dicing quality affects the composite performance, and the dicing mechanism is not clear now. In this study, a theoretical dicing mechanism for PZT-4H ceramics is introduced and validated by the experiments. The results show that, along the dicing depth direction, the dicing surface goes through brittle removal, hybrid of ductile and brittle removal, and pure ductile removal modes. The high wheel speed and low feed rate can help to get the low surface roughness and edge chipping size (width and height) due to the material removal mode transition. The diced kerfs are in saddle shape due to the dicing force variation and wheel vibration in different locations. The composite with high dicing surface quality and consistent size of dicing kerf has low mechanical quality factors variation. The impedance and phase angle at the resonance and anti-resonance frequencies are sharp, which indicates the perfect superposition of the energy from a different pillar. The inconsistent dicing kerf ruined the impedance and phase angle curve after superposition, which shows poor performance.

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Funding

This work was supported by the National Key R&D Program of China (Granted No. 2022YFC3005002) and the National Natural Science Foundation of China (Granted No. 51905498).

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Authors and Affiliations

  1. Department of Mechanical Engineering, North University of China, Taiyuan, 030051, China

    Yao Liu, Yang Zhou, Xuemin Wang & Jinjie Zhou

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  1. Yao Liu
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  2. Yang Zhou
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  3. Xuemin Wang
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  4. Jinjie Zhou
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Contributions

All authors contributed to the study’s conception and design. Yao Liu and JinJie Zhou led the research and writing of the manuscript. Yang Zhou and XueMin Wang finished the experiments and drafted the manuscript. Yao Liu gives the final proofreading. All authors read and approved the final manuscript.

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Correspondence to Jinjie Zhou.

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Liu, Y., Zhou, Y., Wang, X. et al. Study of dicing mechanism influence on PZT-4H composite performance. Int J Adv Manuf Technol 129, 5089–5100 (2023). https://doi.org/10.1007/s00170-023-12633-1

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  • DOI: https://doi.org/10.1007/s00170-023-12633-1

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