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Improvement of dimensional accuracy and surface quality of microlens arrays by a profile cutting method

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Abstract

Single-point diamond cutting is an efficient method to fabricate microlens arrays (MLAs). However, machining MLAs at the microscale with high dimensional accuracy and a smooth surface finish is a difficult task. In this study, a method of profile cutting is proposed to machine MLAs on electroless nickel–phosphorus (Ni–P) plating. To improve the dimensional accuracy of MLAs, a precision tool setting method is introduced, via which the precision of MLA sag can be controlled to within 20 nm. In addition, the formation mechanism of corrugation defects is studied via a finite element (FE) simulation of the wedge nano-cutting process and a cutting experiment of concentric ring grooves. By optimizing the tool settings and the machining parameters, high-quality MLAs with apertures of Φ100 μm can be created.

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Acknowledgements

The authors would also like to acknowledge the support from the Fok Ying-Tong Education Foundation for Young Teachers in the Higher Education Institutions of China (No. 151052).

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Funding

This work has been financially supported by the National Natural Science Foundation of China (Nos. 51775046 and 51875043) and Beijing Municipal Natural Science Foundation (JQ20015).

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Authors and Affiliations

  1. School of Mechanical Engineering, Beijing Institute of Technology, No. 5 Zhongguancun South Street, Haidian District, Beijing, 100081, China

    Tianfeng Zhou, Benshuai Ruan, Qian Yu, Jia Zhou, Peng Liu, Wenxiang Zhao & Xibin Wang

  2. Beijing Institute of Technology Chongqing Innovation Center, Chongqing, 401120, China

    Peng Liu

Authors
  1. Tianfeng Zhou
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  2. Benshuai Ruan
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  3. Qian Yu
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  4. Jia Zhou
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  5. Peng Liu
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  6. Wenxiang Zhao
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  7. Xibin Wang
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Contributions

Tianfeng Zhou and Benshuai Ruan: conceptualization, formal analysis, investigation, writing—original draft, and visualization. Qian Yu, Jia Zhou, Peng Liu, and Wenxiang Zhao: conceptualization, supervision, and writing—review and editing. Xibin Wang: conceptualization and writing—review and editing.

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Correspondence to Tianfeng Zhou.

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Zhou, T., Ruan, B., Yu, Q. et al. Improvement of dimensional accuracy and surface quality of microlens arrays by a profile cutting method. Int J Adv Manuf Technol 115, 1877–1888 (2021). https://doi.org/10.1007/s00170-021-07072-9

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  • DOI: https://doi.org/10.1007/s00170-021-07072-9

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