Abstract
Relative tool sharpness (RTS) is identified as the ratio of undeformed chip thickness to tool cutting edge radius, which plays an important role in affecting the micro- or nano-machining process. This paper studied the effect of RTS on the high precision micro-pyramid array machining of electroless Ni-P plating. A V-shaped diamond tool was adopted, the cutting edge radius of which was measured by a laser scanning confocal microscope (LSCM). The effects of cutting speed and RTS on the machining process were investigated by finite element simulation. A multi-step cutting method was applied for the machining of the micro-pyramid array. Results showed that the optimal machined surface roughness is obtained at a cutting speed of 60 m/min and an RTS of 0.4. Compared with the theoretical profile, the relative errors of the pitch, depth, and included angle of the micro-pyramid array can be controlled below 0.24%, 0.80%, and 2.50%, respectively. The PV value of the machined micro-pyramid array is under 200 nm.
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Acknowledgments
The word is supported by National Natural Science Foundation of China (Numbers 51775046, 51875043, and 52005040) and Beijing Municipal Natural Science Foundation (Number JQ20014).
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Yu, Q. et al. (2022). High Precision Machining of Micro-pyramid Array of Electroless Ni-P Plating Based on Relative Tool Sharpness Effect. In: Yang, S., Luo, X., Yan, Y., Jiang, Z. (eds) Proceedings of the 7th International Conference on Nanomanufacturing (nanoMan2021). nanoMan 2021. Smart Innovation, Systems and Technologies, vol 296. Springer, Singapore. https://doi.org/10.1007/978-981-19-1918-3_4
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DOI: https://doi.org/10.1007/978-981-19-1918-3_4
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