Abstract
Hydrogenated amorphous silicon (a-Si:H) thin films have been considered for use in solar cell applications because of their significantly reduced cost compared with crystalline bulk silicon; however, their overall efficiency and stability are less than that of their bulk crystalline counterparts. Limited work has been performed on solving the efficiency and stability issues of a-Si:H simultaneously. Surface texturing and crystallization on a-Si:H thin film can be achieved through one-step femtosecond laser processing, which can potentially alleviate the disadvantages of a-Si:H in solar cell applications. In this study, submicrometer conical and pillar-shaped spikes are fabricated by irradiating a-Si:H thin films deposited on glass substrates with hundreds of 800 nm-wavelength, 130 fs-duration laser pulses in air, and water environments, respectively. The formation mechanisms for the surface spikes are discussed, and the differences in the surface feature characteristics are also presented and explained within the context of the different processing environments. The effect of laser processing on light absorption and crystallinity will be studied later.
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Wang, H., Kongsuwan, P., Satoh, G. et al. Femtosecond laser-induced simultaneous surface texturing and crystallization of a-Si:H thin film: morphology study. Int J Adv Manuf Technol 65, 1691–1703 (2013). https://doi.org/10.1007/s00170-012-4291-0
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DOI: https://doi.org/10.1007/s00170-012-4291-0