Abstract
Micro-abrasive jet machining (μ-AJM) is a fast and flexible technique for micro-patterning of brittle materials and can be combined with patterned mask made from a material with excellent photolithographic properties. Here, we demonstrate a fabrication method for the realization of a passive micromixer with third-dimensional feature by using a μ-AJM process with employing photopolymer as a mask on a glass slide target. We fabricated the mask using SU8, a photosensitive polymer, applied as a micro-pattern for μ-AJM process. The design and fabrication of the proposed micromixer is the first reported for such a device. Three glass layers were successfully bonded in a single step using a direct bonding method. These three bonded glass layers with micro-patterns etched on them were the realization of third-dimension feature on the micromixer design.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Dongqing L (2004) Electrokinetics in microfluidics. Interface science and technology-vol. 2. Elsevier Academic, Boston
Jones W, Thomas OM, Aref H (1989) Chaotic advection by laminar flow in a twisted pipe. J Fluid Mech 209:335–357 doi:10.1017/S0022112089003137
Aref H (1984) Stirring by chaotic advection. J Fluid Mech 143:1–21 doi:10.1017/S0022112084001233
Sayah A, Solignac D, Cueni T, Gijs MAM (2000) Development of novel low temperature bonding technologies for microchip chemical analysis applications. Sens Actuators A 84:103–108 doi:10.1016/S0924-4247(99)00346-5
Berthold A, Nicola L, Sarro PM, Vellekoop MJ (1999) A novel technological process for glass-to-glass anodic bonding. Proc of Transducers’99, Sendai, Japan, June, pp. 1324–1327
SaragihAS, Lee JH, Ko TJ, Kim HS (2006) Thick SU-8 mask for micro channeling of glass by using microabrasive jet machining. Towards Synthesis of Micro-/Nano-systems-Proc. 11th International Conference of Precision Engineering (ICPE), Japan, Springer London, pp. 187–190
Wensink H, Berenshot U, Jansen HV, Elwenspoek MC (2000) High resolution powder blast micromachining. In: proceeding of Micro Electro Mechanical Systems, (MEMS 2000), Japan, IEEE.org, pp. 769–774
Jain NK, Jain VK (2001) Modeling of material removal in mechanical type advanced machining processes: a state-of-art review. Int J Mach Tools Manuf 41:1573–1635 doi:10.1016/S0890-6955(01)00010-4
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Saragih, A.S., Ko, T.J. Fabrication of passive glass micromixer with third-dimensional feature by employing SU8 mask on micro-abrasive jet machining. Int J Adv Manuf Technol 42, 474–481 (2009). https://doi.org/10.1007/s00170-008-1619-x
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00170-008-1619-x