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Nanometrology for industrial applications

Nanometrologie für industrielle Anwendungen

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Abstract

The development of continuously decreasing workpiece tolerances lies in one line with the perspective of nanotechnology. To fulfil metrological demands since about 1982 new high resolution and high precision measuring devices have been developed. These are computerized instruments and the measuring results are very illustrative figures of tested specimens. But the problem of calibration in the nanometric range is still an open question which normally is done only with high uncertainty. New ideas to find a solution for the problem of sufficiently accurate calibrating will make possible that this measurement technique will be used on a broad basis also in industry.

Zusammenfassung

Die kontinuierliche Entwicklung zu immer engeren Toleranzen bei der Herstellung von Werkstücken liegt in einer Linie mit der Perspektive der Nanotechnologie. Zur Erfüllung von metrologischen Anforderungen derungen werden seit etwa 1982 neue hochpräzise Meßgeräte entwickelt. Es handelt sich um rechnerunterstützte Geräte, welche imstande sind, die Ergebnisse von Werkstück-Untersuchungen sehr anschaulich darzustellen. Die Frage der Kalibrierung im nanometrischen Bereich ist aber eine immer noch vieldiskutierte Frage, welche gegenwärtig nur mit große Unsicherheit beantwortet werden kann. Ein neuer Ansatz zur Lösung des Problems bei hoher Genauigkeit der Kalibrierung für den Laborsowie Industrieeinsatz wird vorgestellt.

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Authors and Affiliations

  1. Department for Interchangeable Manufacturing and Industrial Metrology, TU Wien, Karlsplatz 13/3113, A-1040, Wien

    D. Prostrednik ÖVE (head)

  2. Department for Interchangeable Manufacturing and Industrial Metrology (Austauschbau und Messtechnik) of the Institute of Production Engineering at the Vienna University of Technology (TUW), TU Wien, Karisplatz 13/3113, A-1040, Wien

    P. H. Osanna ÖVE (reader)

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  1. D. Prostrednik ÖVE
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Nach einem Vortrag, gehalten anläßlich des am 26. November 1997 an der Technischen Universität Wien veranstalteten 4. Internationalen Kolloquiums „Mikro- und Nanotechnologie”. Die beschriebenen Forschungsarbeiten erfolgten im Rahmen des Projekts Nr. 5132, gefördert durch den Jubiläumsfonds der Österr. Nationalbank in Wien.

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Prostrednik, D., Osanna, P.H. Nanometrology for industrial applications. Elektrotech. Inftech. 115, 213–217 (1998). https://doi.org/10.1007/BF03159120

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