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Optical-interference calibration of inductive displacement sensors

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Abstract

The technique and results of measurements of the sensitivity of an inductive sensor of small displacements are described. The sensitivity was measured by optical-interference monitoring of the displacement of a metallic reflector fixed to a piezoceramic element. It is shown that this technique ensures the calibration of an eddy-current sensor to an accuracy of no worse than 1 μm.

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References

  1. Ananiev, V.P. and Vinogradov, A.V., The IBR-2 Pulsed Research Reactor: Status Report,Proc. of PANS-II Second Int. Seminar “Advanced Pulsed Neutron Sources: Physics of/at Advanced Pulsed Neutron Soruces,” Dubna, Russia, 1994.

  2. Vibratsii v tekhnike. Spravochnik (Vibrations in Technology. Handbook), Chelomei, V.N., Ed., Moscow: Mashinostroenie, 1981, vol. 5 (Measurements and Tests).

    Google Scholar 

  3. Kolomiitsov, Yu.V.,Interferometry (Interferometers), Leningrad: Mashinostroenie, 1976.

    Google Scholar 

  4. Sobolev, V.S. and Shkarlet, Yu.M.,Nakladnye i ekrannye datchiki (Superposed and Shield Sensors), Novosibirsk: Nauka, 1967.

    Google Scholar 

  5. Fedotov, A.V.,Raschet i proektirovanie induktivnykh izmeritel’nykh ustroistv (Calculation and Design of Inductive Measuring Devices), Moscow: Mashinostroenie, 1979.

    Google Scholar 

  6. Proektirovanie datchikov dlya izmereniya mekhanicheskikh velichin (Design of Sensors for Measuring Mechanical Quantities), Osadchii, E.P., Ed., Moscow: Mashinostroenie, 1979.

    Google Scholar 

  7. Artamonov, A.T. and Volkov, N.P., USSR Inventor’s Certificate no. 464 776,Byull. Izobret., 1975, no. 11, p. 10.

    Google Scholar 

  8. Vanetsian, R.A., Tychinskaya, M.P., Zakharov, V.P.,et al., Kvantovaya Electron. (Moscow), 1971, no. 4, p. 27.

    Google Scholar 

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Authors and Affiliations

  1. All-Russia Research Institute of Experimental Physics, pr. Mira 37, 607190, Sarov, Nizhni Novgorod oblast, Russia

    Yu. D. Bogunenko, G. A. Bondarenko, I. N. Nikitin & V. A. Starodubtsev

  2. Joint Institute for Nuclear Research, Dubna, Russia

    L. V. Edunov

Authors
  1. Yu. D. Bogunenko
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  2. G. A. Bondarenko
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  3. L. V. Edunov
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  4. I. N. Nikitin
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  5. V. A. Starodubtsev
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Bogunenko, Y.D., Bondarenko, G.A., Edunov, L.V. et al. Optical-interference calibration of inductive displacement sensors. Instrum Exp Tech 43, 410–412 (2000). https://doi.org/10.1007/BF02759047

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  • DOI: https://doi.org/10.1007/BF02759047

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