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Modeling the early stages of thin film formation by energetic atom deposition

  • Symposium on Irradiation-Enhanced Materials Science and Engineering
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Abstract

The early stages of thin film formation are described by a simple hybrid model that couples a set of discrete kinetic rate equations to a Fokker-Planck (FP)-type continuum. Unique features of the atomic processes in energetic particle deposition are outlined and discussed. A thermal atom deposition process is benchmarked with Zinsmeister’s analytical theory[17] to demonstrate the simplicity and accuracy of the model. This simplicity allows extensions to the treatment of energetic particle effects and the growth of multilayers of atoms. It is shown that the model explains the major features of the early stages of atomic clustering.

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Authors and Affiliations

  1. Mechanical, Aerospace and Nuclear Engineering Department, University of California-Los Angeles, 90024, Los Angeles, CA

    C. A. Stone (Graduate Student) & N. M. Ghoniem (Professor of Engineering)

Authors
  1. C. A. Stone
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  2. N. M. Ghoniem
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Additional information

This paper is based on a presentation made in the symposium “Irradiation-Enhanced Materials Science and Engineering” presented as part of the ASM INTERNATIONAL 75th Anniversary celebration at the 1988 World Materials Congress in Chicago, IL, September 25-29, 1988, under the auspices of the Nuclear Materials Committee of TMS-AIME and ASM-MSD.

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Stone, C.A., Ghoniem, N.M. Modeling the early stages of thin film formation by energetic atom deposition. Metall Trans A 20, 2609–2617 (1989). https://doi.org/10.1007/BF02670154

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  • DOI: https://doi.org/10.1007/BF02670154

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