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Thin foils of non-metals made for electron microscopy by sputter-etching

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Abstract

Established techniques of making thin foils of non-metallic materials are reviewed briefly and their inadequacies outlined. The preparation of foils by sputter-etching is described and the effects on the sample of ion current density, and angle of ion incidence are discussed. Results on specimens of ceramics, glasses and minerals are presented. From these it is concluded that sputter-etching is a valuable and nearuniversal thinning technique for non-metals.

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Authors and Affiliations

  1. Department of Physics, University of Essex, Colchester, UK

    D. J. Barber

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  1. D. J. Barber
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Barber, D.J. Thin foils of non-metals made for electron microscopy by sputter-etching. J Mater Sci 5, 1–8 (1970). https://doi.org/10.1007/BF02427178

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  • DOI: https://doi.org/10.1007/BF02427178

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