Abstract
Transmission electron microscopy of thin, polycrystalline copper foils has revealed the formation of a sputtering structure after bombardment at normal incidence with Xe+, Cu+, or Pb+ ions of 50 to 80 keV energy. In general, the surface of each individual grain degenerates into a “hill and valley” structure, so as to develop those {100} faces lying nearest to the plane of the surface. The sputtering structure has been found to be independent of any prior electropolishing surface structure. Similarity between the spacing and crystallographic direction of the sputtering structure, and the general appearance of the dislocation arrays produced by ion bombardment, suggests that these dislocations could influence the initiation of the structure. A tentative model based on this hypothesis is proposed to account for the periodicity of the observed sputtering effect.
Similar content being viewed by others
References
P. Haymann and C. Waldburger, “Ionic Bombardment, Theory and Applications”, CNRS Symposium, 1962 (Science Publishing Inc, 1964).
M. Kaminsky, “Atomic and Ionic Impact Phenomena on Metal Surfaces” (Springer-Verlag, Berlin, 1965).
I. Teodorescu, Stud. Cėr. Fizica 18 (1966) 511.
R. L. Cunningham, P. Haymann, C. Lecomte, W. J. Moore, and J. J. Trillat, J. Appl. Phys. 31 (1960) 839.
P. Haymann, Compt. rend. Acad. Sci. 256 (1960) 85.
A. D. G. Stewart, “5th Int. Congr. for Electron Microscopy, Philadelphia” (Academic Press, NewYork, 1962), D-12.
O. Almén and G. Bruce, Nucl. Instr. and Methods 11 (1961) 257 and 279.
R. S. Nelson and M. W. Thompson, Phil. Mag. 8 (1963) 1677.
D. Onderdelinden, Appl. Phys. Lett. 8 (1966) 189.
R. S. Nelson and M. W. Thompson, Proc. Roy. Soc. A 259 (1961) 458.
D. J. Mazey and R. S. Barnes, “6th Int. Congr. for Electron Microscopy, Kyoto, Japan” (Maruzen Co, Tokyo, 1966), p. 356.
R. Castaing and B. Jouffrey, Compt. rend. Acad. Sci. 252 (1961) 2696.
D. Onderdelinden, F. W. Saris, and P. K. Rol, “Proc. 7th Int. Conf. on Phenomena in Ionised Gases”, Vol. I (Gradevinska Knjiga Publishing House, Beograd, 1965), p. 157.
F. J. Bradshaw, R. H. Brandon, and C. Wheeler, Acta Met. 12 (1964) 1057.
M. W. Thompson (University of Sussex, 1967), private communication, to be published.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Mazey, D.J., Nelson, R.S. & Thackery, P.A. Electron microscope examination of the surface topography of ion-bombarded copper. J Mater Sci 3, 26–32 (1968). https://doi.org/10.1007/BF00550886
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF00550886