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Radio-frequency induction plasmas at atmospheric pressure: Mixtures of hydrogen, nitrogen, and oxygen with argon

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Abstract

Numerical calculations are reported which simulate atmospheric-pressure radiofrequency induction plasmas consisting of either pure argon or mixtures of argon with hydrogen, nitrogen, or oxygen. These calculations are compared to observations of laboratory plasmas generated with the same geometry and run conditions. The major features of the laboratory plasmas are predicted well by the calculations: the pure argon plasma is the largest, with the argon-oxygen plasma slightly smaller. The argon-nitrogen plasma is considerably smaller and the argon-hydrogen plasma is the shortest, although somewhat fatter than the argon-nitrogen case. The calculations are not entirely successful in predicting the exact location of the plasmas relative to the coils. A likely explanation is that there is significant uncertainty regarding the actual power coupled to the laboratory plasmas.

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References

  1. T. B. Reed,J. Appl. Phys. 32, 821 (1961).

    Google Scholar 

  2. M. I. Boulos,Pure Appl. Chem. 57, 1321–1352 (1985).

    Google Scholar 

  3. Boulos, M. I. and R. M. Barnes, inInductively Coupled Plasma Emission Spectroscopy, Part 2, edited by P. W. J. M. Boumans, Wiley, New York (1987), Chapter 9, pp. 289–352.

    Google Scholar 

  4. J. W. McKelliget and N. El-Kaddah,Mater. Res. Soc. Symp. Proc. 98, 21–27 (1987).

    Google Scholar 

  5. J. Mostaghimi and M. Boulos,Plasma Chem. Plasma Process.9, 25–44 (1989).

    Google Scholar 

  6. Xi, Chen,J. Phys. D: Appl. Phvs. 22, 361–363 (1989).

    Google Scholar 

  7. P. Yang, R. M. Barnes, J. Mostaghimi, and M. I. Boulos,Spectrochim. Acta 44B, 657–666 (1989).

    Google Scholar 

  8. P. Yang, Ph.D. dissertation, University of Massachusetts, 1987.

  9. M. P. Freeman, and J. D. Chase,J. Appl. Phys. 39, 180–190 (1968).

    Google Scholar 

  10. R. M. Barnes and S. Nikdel,Appl. Phys. 47, 3929–3934 (1976).

    Google Scholar 

  11. J. Mostaghimi, P. Proulx, and M. I. Boulos,Plasma Chem. Plasma Process.4, 199–217 (1984).

    Google Scholar 

  12. R. M. Barnes, N. Kovacic, and G. A. Meyer,Spectrochim. Acta 40B, 907–918 (1985).

    Google Scholar 

  13. J. Mostaghimi, P. Proulx, and M. I. Boulos,J. Appl. Phvs. 61, 1753–1760 (1987).

    Google Scholar 

  14. J. Mostaghimi and M. l. Boulos, Proc. 9th International Symposium on Plasma Chemistry, Pugnochiuso, Italy, Sept. 4–8, 1989, Vol. 1, pp. 91–95.

  15. C. H. Kruger,Plasma Chem. Plasma Process.9, 435–443 (1989).

    Google Scholar 

  16. R. B. Bird, W. E. Stewart, and E. N. Lightfoot,Transport Phemomena, Wiley, New York (1960).

    Google Scholar 

  17. F. Burhorn, and R. Wienecke,Z. Phys. Chem. 215, 269–284 (1960).

    Google Scholar 

  18. V. R. Watson and E. B. Pegot, NASA Technical Note, TN-D-4042 (1967).

  19. Y. S. Touloukian, et al.,Thermophysical Properties of Matter, IFI/Plenum Data Corp., New York (1970).

    Google Scholar 

  20. JANAF Thermochemical Tables, 3rd edn.,J. Phvs. Chem. Ref Data 14, Suppl. 1 (1985).

  21. D. L. Evans, and R. S. Tankin,Phys. Fluids 10, 1137–1144 (1967).

    Google Scholar 

  22. C. H. Kruger, recent unpublished results.

  23. V. R. Watson and E. B. Pegot, NASA Technical Note, TN-D-4042 (1967).

  24. P. J. Shayler and M. T. C. Fang,J. Phys. D: Appl. Phys. 11, 1743–1756 (1978).

    Google Scholar 

  25. R. U. Krey and I. C. Morris,Phys. Fluids 13, 1483–1487 (1970).

    Google Scholar 

  26. S. V. Patankar,Numerical Hear Transfer and Fluid Flow, McGraw-Hill, New York (1980).

    Google Scholar 

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Girshick, S.L., Yu, W. Radio-frequency induction plasmas at atmospheric pressure: Mixtures of hydrogen, nitrogen, and oxygen with argon. Plasma Chem Plasma Process 10, 515–529 (1990). https://doi.org/10.1007/BF01447262

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  • DOI: https://doi.org/10.1007/BF01447262

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