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Noninvasive plasma diagnostics in a parallel-plate reactor for RF discharges

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Abstract

Extensive studies on the discharge current of a 50-kHz argon glow discharge in a parallel-plate reactor has led to a model that is able to describe the discharge in a wide range of pressures and powers for the evaluation of plasma parameters. The network simulation program PSPICE can be used to simulate the model in a way easily adopted to other plusma reactors as well. This may lead to a new plasma diagnostic method that does not require a complicated setup. The behavior of the discharge current can also he used for numerical simulations of the sell bias voltage in capacitively coupled plasma reactors. The influence of power and pressure can be integrated and allows an estimation of the self-bias for given reactor geometries and process parameters.

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Authors and Affiliations

  1. Institut für Plasmaforschung, Universität Stuttgart, Pfaffenwaldring 31, D-70569, Stuttgart, Germany

    J. Schwarz

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  1. J. Schwarz
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Schwarz, J. Noninvasive plasma diagnostics in a parallel-plate reactor for RF discharges. Plasma Chem Plasma Process 16, 487–498 (1996). https://doi.org/10.1007/BF01447005

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  • DOI: https://doi.org/10.1007/BF01447005

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