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RF Inductively Coupled Plasma Torches

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Handbook of Thermal Plasmas

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Abstract

The basic concept of the inductively coupled radio frequency (RF) plasma has been known since the middle of the twentieth century. The technology attracted increasing attention for a wide range of applications varying from small-scale systems for elemental analysis, to large power installations for the testing of materials for the aerospace industry. Induction plasmas have also been widely used in the fiber optics industry, and more recently for the synthesis and processing of advanced materials including nano- and micron-sized high-purity spherical powders. In this chapter, the basic concepts used for the generation of inductively coupled RF plasmas are presented. These are followed by a detailed discussion of the energy coupling mechanism and induction plasma torch design. The results of a wide range of diagnostic and modeling studies are reviewed providing a description of the main features of the electromagnetic, temperature, flow, and concentration fields in the discharge.

E. Pfender: deceased

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Abbreviations

AC:

Alternating current

DC:

Direct current

i.d.:

Internal diameter

ICP:

Inductively coupled plasma

ITSC:

Internal Thermal Spray Conference

ISPC:

International Symposium on Plasma Chemistry

MS:

Mass spectrometry

o.d.:

Outside diameter

OES:

Optical emission spectroscopy

RC:

Radiation cooled

RF:

Radio frequency

slm:

Standard liters per minute

vs:

Versus

WC:

Water cooled

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Author information

Authors and Affiliations

  1. Department of Chemical Engineering, University of Sherbrooke and Tekna Plasma Systems Inc., Sherbrooke, Québec, Canada

    Maher I. Boulos

  2. European Center of Ceramics, University of Limoges, 12 rue Atlantis, 87068, Limoges, France

    Pierre Fauchais

  3. Minneapolis, MN, USA

    Emil Pfender

Authors
  1. Maher I. Boulos
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  2. Pierre Fauchais
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  3. Emil Pfender
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Corresponding author

Correspondence to Maher I. Boulos .

Nomenclature and Greek Alphabet

\( \overrightarrow{\textrm{B}} \)

Magnetic field vector

Bz

Magnetic flux intensity in the axial direction

c

Speed of light in space (c = 299,792,458 m/s)

cp

Specific heat (J/K.kg)

\( \overrightarrow{\textrm{E}} \)

Electric field vector (V/m)

f

Oscillator frequency (Hz)

Ic

Coil current (A)

Ig

Grid current (A)

Ip

Plate current (A)

j

Current density (A/m2)

jϑ

Azimuthal current density (A/m2)

ℓ

Characteristic dimension of the discharge space

mi

Cooling water flow rate (kg/s)

pa

Chamber pressure (kPa)

Pac

Reactive power in the oscillator circuit (kW)

P

Local energy generation through ohmic heating \( \left(\textrm{P}=\upsigma\ {\left|\textrm{E}\right|}^2\right) \) (W/m3)

Pc

Total power recovered in torch cooling water circuit, Eq. 4 (kW)

Pi

Power recovered in cooling water stream i (kW)

pmo

Magnetically induced pressure (Pa)

Pgen,

Power recovered in power supply cooling water (kW)

P0

Power coupled into the discharge (kW)

Ptor

Power recovered in torch cooling water (kW)

Ppb

Power recovered in probe cooling water (kW)

Ppt

Plate power (kW)

Preac.

Power recovered in reactor cooling water (kW)

Pw

Total power recovered in system cooling water circuit, Eq. 5 (kW)

Qce

Central gas flow rate (slm)

Qin

Injected gas flow rate (slm)

Qpb

Probe gas flow rate (slm)

Qsh

Sheath gas flow rate (slm)

r

Distance in the radial direction (mm)

rc

Internal radius of the induction coil (m)

rn

Radius of discharge (m)

ro

Internal radius of the plasma-confining tube (m)

Tin

Inlet temperature of cooling water (°C)

Tout

Exit temperature of cooling (°C)

vz

Axial velocity component (m/s)

Vp

Plate voltage (kV)

y

Molar fraction

z

Distance in the axial direction (mm)

δt

Thickness of skin depth (m)

ϕE

Phase angle of electric field

ϕH

Phase angle of magnetic field

ηc

Energy coupling efficiency, Eq. 6

ηo

Overall energy coupling efficiency, Eq. 7

κc

Coupling parameter, \( \left[{\upkappa}_{\textrm{c}}=\sqrt{2}\ \left(\frac{{\textrm{r}}_{\textrm{n}}}{\updelta_{\textrm{t}}}\right)\right] \)

λ

Wave length (m)

μ0

Magnetic permeability of vacuum (μo = 4π × 10−7) (H/m)

ρ

Mass density (kg/m3)

σo

Electrical conductivity (mho/m) or (A/V. m)

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Boulos, M.I., Fauchais, P., Pfender, E. (2023). RF Inductively Coupled Plasma Torches. In: Handbook of Thermal Plasmas. Springer, Cham. https://doi.org/10.1007/978-3-319-12183-3_17-2

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  • DOI: https://doi.org/10.1007/978-3-319-12183-3_17-2

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-12183-3

  • Online ISBN: 978-3-319-12183-3

  • eBook Packages: Springer Reference EngineeringReference Module Computer Science and Engineering

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Chapter history

  1. Latest

    RF Inductively Coupled Plasma Torches
    Published:
    09 November 2022

    DOI: https://doi.org/10.1007/978-3-319-12183-3_17-2

  2. Original

    Inductively Coupled Radio Frequency Plasma Torches
    Published:
    16 June 2016

    DOI: https://doi.org/10.1007/978-3-319-12183-3_17-1

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