Skip to main content
SpringerLink
Log in

Buried channel waveguides in plasma-enhanced chemical vapour deposited silicon oxynitride layers on silicon substrates, formed by electron-beam irradiation

  • Papers
  • Published:
Optical and Quantum Electronics Aims and scope Submit manuscript

Abstract

It is shown that buried channel waveguides may be formed from a bilayer planar guide (made by plasma-enhanced chemical vapour deposition of silicon oxynitride) by bombardment with low-energy electrons. This results in an expansion of the material, and hence a decrease in the refractive index. Consequently, irradiation around a narrow stripe will induce lateral confinement. Data are presented for the electron-induced refractive index and volume changes, together with preliminary results for single-mode channel guides operating at 1.52μm wavelength.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. N. Takato, M. Yasu andM. Kawachi,Electron. Lett. 22, (1986) 321.

    Google Scholar 

  2. C. H. Henry, R. F. Kazarinov, H. J. Lee, K. J. Orlowsky andL. E. Katz,Appl. Opt. 26 (1987) 2621.

    Google Scholar 

  3. D. E. Bossi, J. M. Hammer andJ. M. Shaw,ibid. 26 (1987) 609.

    Google Scholar 

  4. A. J. Houghton andP. D. Townsend,Appl. Phys. Lett. 29 (1976) 565.

    Google Scholar 

  5. C. B. Norris andE. P. Eer Nisse,J. Appl. Phys. 45 (1974) 3876.

    Google Scholar 

  6. T. A. Dellin, D. A. Tichenor andE. H. Barsis,ibid. 48 (1977) 1131.

    Google Scholar 

  7. H. Nishihara, Y. Handa, T. Suhara andJ. Koyama,Appl. Opt. 17 (1978) 2342.

    Google Scholar 

  8. Y. Handa, T. Suhara, H. Nishihara andJ. Koyama,ibid. 18 (1979) 248.

    Google Scholar 

  9. S. J. Madden, PhD thesis, University of London (1990).

  10. D. Barbier, M. Green andS. J. Madden,IEEE J. Lightwave Technol., submitted.

  11. S. J. Madden, M. Green andD. Barbier,Appl. Phys. Lett. 57 (1990) 2902.

    Google Scholar 

  12. J. S. Leach, Private communication.

  13. G. L. Destefanis, P. D. Townsend andJ. P. Gailliard,Appl. Phys. Lett. 32 (1978) 293.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Optical and Semiconductor Devices Section, Department of Electrical Engineering, Imperial College London, Exhibition Road, London SW7, UK

    J. Lewandowski, R. R. A. Syms, S. Madden & M. Green

Authors
  1. J. Lewandowski
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. R. R. A. Syms
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. S. Madden
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. M. Green
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Lewandowski, J., Syms, R.R.A., Madden, S. et al. Buried channel waveguides in plasma-enhanced chemical vapour deposited silicon oxynitride layers on silicon substrates, formed by electron-beam irradiation. Opt Quant Electron 23, 703–711 (1991). https://doi.org/10.1007/BF00613002

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00613002

Keywords

Search

Navigation