Abstract
We report on the fabrication of channel waveguides by He ion implantation in a single-crystal LiNbO3 film bonded to a SiO2/LiNbO3 substrate. The planar waveguides were also formed under the same conditions to show the refractive index changes and the thermal annealing properties of ion-implanted LiNbO3 thin film. Using a moderate implantation energy, the formed channel waveguides were clean because He ions passed through the LiNbO3 thin film and deposited into the SiO2 layer. The optical propagation properties of channel waveguides were measured using an end-face coupling method, and the theoretical results were simultaneously calculated for comparison. The mode sizes and end-face reflectivities of channel waveguides with different widths were numerically calculated. The propagation losses were also estimated at approximately 12.2 and 14.3 dB/cm for 7 μm- and 5 μm-wide waveguides, respectively, by the Fabry–Perot method.
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Acknowledgements
The authors acknowledge Professor Hui Hu for fruitful discussion and the Research Center of Nanoln for providing the LNOI samples. This work is supported by the National Natural Science Foundation of China (Grant Nos. 11305096 and 11405098).
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Zhang, SM., Jiang, YP. & Jiao, Y. Clean waveguides in lithium niobate thin film formed by He ion implantation. Appl. Phys. B 123, 220 (2017). https://doi.org/10.1007/s00340-017-6797-5
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DOI: https://doi.org/10.1007/s00340-017-6797-5