Abstract
The effect of ambient vacuum conditions on the electrical formation of thin-film MIM structures is investigated. The results of the electron microscope studies of the structure of formed and breakdown channels are reported. It is shown that the electrical formation is a sequence of two physically dissimilar phenomena: the electrical breakdown, culminating in the formation of breakdown channels with specific geometrical sizes and structure, and the transformation of the conductivity of such breakdown channels (in the presence of an ambient atmosphere with specific composition and pressure) into the conductivity characteristic of formed “sandwich” and planar MIM systems.
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Institute of Automated Control Systems and Radioelectronics, Tomsk. Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 5, pp. 115–120, May, 1992.
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Gaponenko, V.M. Nature of the formation of formed channels in thin-film MIM systems. Russ Phys J 35, 490–494 (1992). https://doi.org/10.1007/BF00558866
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DOI: https://doi.org/10.1007/BF00558866