Abstract
Polycrystalline diamond film deposition is studied under the influence of a pulsed supersonic beam. The beam is formed by a high-pressure value which is used as gas inlet in an otherwise conventional hot-filament reactor. The growth rate of the films as well as the typical size of the microcrystallites are independent of the stagnation pressure behind the nozzle of the valve as long as the background pressure and the gas flow through the chamber are kept constant. In contrast, a drastic change in texture formation is found.
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Sprang, H., Busmann, HG., Lauer, S. et al. Texture formation in polycrystalline diamond vapour growth under the influence of a pulsed supersonic beam. Appl. Phys. A 55, 347–351 (1992). https://doi.org/10.1007/BF00324083
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DOI: https://doi.org/10.1007/BF00324083