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Formation of periodic ring structures of relief and voids under laser vapor deposition of metallic films

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Abstract

The formation of periodic ring structures during laser-induced chemical vapor deposition of metals from metal carbonyl is observed experimentally and described by a theoretical model.

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References

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Authors and Affiliations

  1. Technological Laser Research Center Shatura, SU-140700, Moscow Region, USSR

    V. N. Bagratashvili, A. F. Banishev, S. A. Gnedoy, V. I. Emelyanov, A. N. Jerikhin, K. S. Merzljakov, V.Ya. Panchenko & V. N. Seminogov

  2. Moscow State University, SU-119899, Moscow, USSR

    V. I. Emelyanov

Authors
  1. V. N. Bagratashvili
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  2. A. F. Banishev
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  3. S. A. Gnedoy
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  4. V. I. Emelyanov
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  5. A. N. Jerikhin
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  6. K. S. Merzljakov
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  7. V.Ya. Panchenko
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  8. V. N. Seminogov
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Bagratashvili, V.N., Banishev, A.F., Gnedoy, S.A. et al. Formation of periodic ring structures of relief and voids under laser vapor deposition of metallic films. Appl. Phys. A 52, 438–444 (1991). https://doi.org/10.1007/BF00323656

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  • DOI: https://doi.org/10.1007/BF00323656

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