Abstract
In this study, a new lithium-silicon-oxynitride (LiSiON) solid-state thin-film electrolyte was investigated for the first time. The LiSiON thin-film electrolyte was deposited by using the RF sputtering technique. In order to compare the LiSiON thin-film electrolyte to lithium phosphorous oxynitride (LiPON), a conventional thin-film electrolyte, were deposited LiPON thin-film electrolytes by using RF sputtering. Surface morphologies and cross-sectional views of the thin-film electrolytes were characterized by using field emission scanning electron microscopy (FE-SEM). The thin-films showed smooth surfaces without any cracks and pinholes. The smooth surfaces are thought to decrease the interfacial resistance between the electrolyte and the electrodes. In addition, surface morphologies were characterized by using atomic force microscopy (AFM). The sputtering rates were calculated using the thicknesses of the thin-films, as obtained from cross-sectional views. The structural properties of the thin-films were characterized using X-ray diffraction (XRD). All thinfilms showed amorphous properties compared to the target material which is a crystalline material. The ionic conductivity of the LiSiON thin-film was 2.47 × 10 −6 (S/cm), which is slightly higher than that of a common thin-film electrolyte LiPON.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
M. Armand and J. M. Tarascon, Nature 451, 652 (2008).
Q. Wang et al., J. Power Sources 208, 210 (2012).
D. Deng, Energy Sci. Eng. 3, 385 (2015).
H. Cha et al., Small 14, 1702989 (2018).
K-H. Choi, D. B. Ahn and S-Y. Lee, ACS Energy Lett. 3, 220 (2018).
Y. Wang et al., J. Power Sources 286, 330 (2015).
J. Schwenzel, V. Thangadurai and W. Weppner, J. Power Sources 154, 232 (2006).
J. Li et al., Adv. Energy Mater. 5, 1401408 (2015).
K. F. Chiu et al., Vacuum 84, 1296 (2010).
C. M. Julien and A. Mauger, Coatings 9, 386 (2019).
R. Z. Hu, M. Q. Zeng and M. Zhu, Electrochim. Acta 54, 2843 (2009).
D. J. Kalita et al., Solid State Ion. 229, 14 (2012).
H. Chen, H. Tao, X. Zhao and Q. Wu, J. Non-Cryst. Solids 357, 3267 (2011).
S-W. Song, K-C. Lee and H-Y. Park, J. Power Sources 328, 311 (2016).
E. Crinon and J. T. Evans, Mater. Sci. Eng. A 242, 121 (1998).
P. C. Soares, E. D. Zanotto, V. M. Fokin and H. Jain, J. Non-Cryst. Solids 331, 217 (2003).
P. Duwez, R. H. Willens and W. Klement, Jr., J. Appl. Phys. 31, 1136 (1960).
S. W. Anwane, Solid Electrolytes: Principles and Applications (Wiley, Nagpur, 2014).
J. Schwenzel, V. Thangadurai and W. Weppner, Ionics 9, 348 (2003).
B. Fleutot et al., Solid State Ion. 186, 29 (2011).
Z. Gao et al., Adv. Mater. 30, 1705702 (2018).
Acknowledgments
This paper was supported by research funds for newly appointed professors of Jeonbuk National University in 2016. This work was also supported by National Research Foundation of Korea (NRF) (2017 R1A2B4007758) & (2018R1A4A1025528).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Na, D., Lee, B., Yoon, B. et al. A Solid-State Thin-Film Electrolyte, Lithium Silicon Oxynitride, Deposited by using RF Sputtering for Thin-Film Batteries. J. Korean Phys. Soc. 76, 855–859 (2020). https://doi.org/10.3938/jkps.76.855
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.3938/jkps.76.855