Abstract
In this work Molecular layer deposition (MLD) technique used to synthesize titanium-vanadium (TiV x C y O z ) and aluminum-vanadium (AlV x C y O z ) hybrid organic-inorganic films via alternating surface reactions of titanium tetrachloride (or trimethylaluminum), vanadium oxochloride, and ethylene glycol. Using in situ monitoring it was found that the surface reactions were self-limiting at temperatures of 90 and 115°C. The coating thickness per molecular layer deposition cycle (growth rate) at 115°C on a silicon substrate varied from 5.8 to 11.4 Å/cycle, and the film densities, from 1.7 to 2.0 g cm–3. An analysis of the samples obtained at 115°C revealed their amorphous structure. A thermal treatment of titanium-vanadium films at 450°C in air resulted in formation of highly structured coatings. These coatings were composed of nanowires of single-crystal vanadium oxide (V2O5) and mixed nanostructures of titanium and vanadium oxides. Increase in thermal treatment temperature to 500°C resulted in elongation of the V2O5 nanowires up to tens of micrometers and in their separation from the substrate. A thermal treatment of aluminum-vanadium films in air resulted in formation of a low-density film. Pyrolysis of the films in an inert gas yielded composite coatings containing domains of graphitized carbon. These films can be potentially useful in modern devices for energy storage, electronics, medicine and other promising fields of technology.
Similar content being viewed by others
References
Malygin, A.A., Drozd, V.E., Malkov, A.A., and Smirnov, V.M., Chem. Vapor. Depos., 2015, vol. 21, nos. 10–12, pp. 216–240.
George, S.M., Chem. Rev., 2010, vol. 110, no. 1, pp. 111–131.
George, S.M., Yoon, B., and Dameron, A.A., Accounts Chem. Res., 2009, vol. 42, no. 4, pp. 498–508.
Gregorczyk, K. and Knez, M., Prog. Mater. Sci., 2016, vol. 75, pp. 1–37.
Lee, B.H., Yoon, B., Abdulagatov, A.I., et al., Adv. Funct. Mater., 2013, vol. 23, no. 5, pp. 532–546.
Sundberg, P. and Karppinen, M., Beilstein J. Nanotech., 2014, vol. 5, pp. 1104–1136.
Abdulagatov, A.I., Terauds, K.E., Travis, J.J., et al., J. Phys. Chem. C, 2013, vol. 117, no. 34, pp. 17442–17450.
Liang, X.H., Yu, M., Li, J.H., et al., Chem. Commun., 2009, vol. 46, pp. 7140–7142.
Qin, Y., Yang, Y., Scholz, R., et al., Nano Lett., 2011, vol. 11, no. 6, pp. 2503–2509.
Piper, D.M., Travis, J.J., Young, M., et al., Adv. Mater., 2014, vol. 26, no. 10, pp. 1596–1601.
Ban, C.M. and George, S.M., Adv. Mater. Interfaces, 2016, vol. 3, no. 21, p. 1600762.
Van de Kerckhove, K., Mattelaer, F., Deduytsche, D., et al., Dalton T, 2016, vol. 45, no. 3, pp. 1176–1184.
Yu, D., Yang, Y.Q., Chen, Z., et al., Opt. Commun., 2016, vol. 362, pp. 43–49.
Gould, T.D., Izar, A., Weimer, A.W., et al., ACS Catal., 2014, vol. 4, no. 8, pp. 2714–2717.
Yu, M.A., Funke, H.H., Noble, R.D., and Falconer, J.L., J. Am. Chem. Soc., 2011, vol. 133, no. 6, pp. 1748–1750.
Kao, C.Y., Li, B., Lu, Y., et al., J. Mater. Chem. C, 2014, vol. 2, no. 30, pp. 6171–6176.
Smirnov, V.M., Zemtsova, E.G., Belikov, I.L., et al., Dokl. Akad. Nauk, 2007, vol. 413, no. 6, pp. 776–780
Smirnov, V.M., Zemtsova, E.G., Belikov, A.A., et al., Dokl. Phys. Chem., 2007, vol. 413, pp. 95–98).
Higgs, D.J., University of Colorado at Boulder, U.S.A., 2016.
Masih, D., Yoshitake, H., and Izumi, Y., Appl. Catal., A, 2007, vol. 325, no. 2, pp. 276–282.
Klosek, S. and Raftery, D., J. Phys. Chem. B, 2001, vol. 105, no. 14, pp. 2815–2819.
Lee, K. and Cao, G.Z., J. Phys. Chem. B, 2005, vol. 109, no. 24, pp. 11880–11885.
Kurttepeli, M., Deng, S., Mattelaer, F., et al., ACS Appl. Mater. Int., 2017, vol. 9, no. 9, pp. 8055–8064.
Takahashi, K., Wang, Y., Lee, K., and Cao, G., Appl. Phys. A: Mater., 2006, vol. 82, no. 1, pp. 27–31.
Weckhuysen, B.M. and Keller, D.E., Catal. Today, 2003, vol. 78, nos. 1–4, pp. 25–46.
Van de Kerckhove, K., Mattelaer, F., Dendooven, J., and De Tavernier, C., Dalton T, 2017, vol. 46, no. 14, pp. 4542–4553.
Abdulagatov, A.I., Hall, R.A., Sutherland, J.L., et al., Chem. Mater., 2012, vol. 24, no. 15, pp. 2854–2863.
Dameron, A.A., Seghete, D., Burton, B.B., et al., Chem. Mater., 2008, vol. 20, no. 10, pp. 3315–3326.
Elam, J.W., Groner, M.D., and George, S.M., Rev. Sci. Instrum., 2002, vol. 73, no. 8, pp. 2981–2987.
Seghete, D., Hall, R.A., Yoon, B., and George, S.M., Langmuir, 2010, vol. 26, no. 24, pp. 19045–19051.
Wilson, C.A., Grubbs, R.K., and George, S.M., Chem. Mater., 2005, vol. 17, no. 23, pp. 5625–5634.
Drake, N.L. and Smith, T.B., J. Am. Chem. Soc., 1930, vol. 52, pp. 4558–4566.
Minachev, K.M., Antoshin, G.V., Klissurski, D.G., et al., React. Kinet. Catal. Lett., 1979, vol. 10, no. 2, pp. 163–167.
HSC Chemistry 2002, Version 5.1.
Maly gin, A.A., Russ. J. Gen. Chem., 2002, vol. 72, no. 4, pp. 575–589.
Barin, I. and Platzki, G., Thermochemical Data of Pure Substances, Weinheim: VCH, 1995, 3rd ed.
Tawfik, W.Y. and Teja, A.S., Chem. Eng. Sci., 1989, vol. 44, no. 4, pp. 921–923.
Groner, M.D., Fabreguette, F.H., Elam, J.W., and George, S.M., Chem. Mater., 2004, vol. 16, no. 4, pp. 639–645.
Piercy, B.D., Leng, C.Z., and Losego, M.D., J. Vac. Sci. Technol. A, 2017, vol. 35, no. 3, 03E107.
George, S.M., Lee, B.H., Yoon, B., et al., J. Nanosci. Nanotechnol., 2011, vol. 11, no. 9, pp. 7948–7955.
CRC Handbook of Chemistry and Physics. CRC Press, 2007, 88th ed.
Ishchuk, S., Taffa, D.H., Hazut, O., et al., ACS Nano, 2012, vol. 6, no. 8, pp. 7263–7269.
Sarkar, D., Ishchuk, S., Taffa, D.H., et al., J. Phys. Chem. C, 2016, vol. 120, no. 7, pp. 3853–3862.
Su, Q., Liu, X.Q., Ma, H.L., et al., J. Solid-State Electron Devices, 2008, vol. 12, nos. 7–8, pp. 919–923.
Zhang, J., Xu, Q., Feng, Z.C., and Li, C., Nanostruct. Sci. Technol., 2010, pp. 153–184.
Habel, D., Goerke, O., Tovar, M., et al., J. Phase Equilib. Diffus., 2008, vol. 29, no. 6, pp. 482–487.
Ostermann, R., Li, D., Yin, Y.D., et al., Nano Lett., 2006, vol. 6, no. 6, pp. 1297–1302.
Zou, C.W., Yan, X.D., Patterson, D.A., et al., CrystEng- Comm, 2010, vol. 12, no. 3, pp. 691–693.
Vejux, A. and Courtine, P., J. Solid State Chem., 1978, vol. 23, nos. 1–2, pp. 93–103.
Vejux, A. and Courtine, P., J. Solid State Chem., 1986, vol. 63, no. 2, pp. 179–190.
Glushenkov, A.M., Stukachev, V.I., Hassan, M.F., et al., Cryst. Growth Des., 2008, vol. 8, no. 10, pp. 3661–3665.
Overbury, S.H., Bertrand, P.A., and Somorjai, G.A., Chem. Rev., 1975, vol. 75, no. 5, pp. 547–560.
Haber, J., Pure Appl. Chem., 1984, vol. 56, no. 12, pp. 1663–1676.
Haber, J., Machej, T., and Czeppe, T., Surf. Sci., 1985, vol. 151, no. 1, pp. 301–310.
Haber, J., Catal. Today, 2009, vol. 142, nos. 3–4, pp. 100–113.
Wren, A.W., Adams, B.M., Pradhan, D., et al., Mater. Chem. Phys., 2014, vol. 144, no. 3, pp. 538–546.
Livage, J., Materials, 2010, vol. 3, no. 8, pp. 4175–4195.
Dabrowska, G., Tabero, P., and Kurzawa, M., J. Phase Equilib. Diffus., 2009, vol. 30, no. 3, pp. 220–229.
Knozinger, H. and Taglauer, E., Specialist Periodical Reports, Catalysis, Sanjay, K., Agarwal, J., and Spivey, J., Eds., Royal Soc. Chem., 1993, vol. 10.
Haber, J., Machej, T., Serwicka, E.M., and Wachs, I.E., Catal. Lett., 1995, vol. 32, nos. 1–2, pp. 101–114.
Stander, F. and Vanvuuren, C.P., J. Thermochim. Acta, 1990, vol. 165, no. 1, pp. 73–83.
Stander, F. and Vanvuuren, C.P., J. Thermochim. Acta, 1990, vol. 165, no. 1, pp. 85–91.
Lattimer, R.P., J. Anal. Appl. Pyrolysis, 2000, vol. 56, no. 1, pp. 61–78.
Koc, R., J. Mater. Sci., 1998, vol. 33, no. 4, pp. 1049–1055.
Gruner, W., Stolle, S., and Wetzig, K., Int. J. Refract. Met. Hard. Mater., 2000, vol. 18, nos. 2–3, pp. 137–145.
Ferrari, A.C. and Robertson, J., Phys. Rev. B, 2000, vol. 61, no. 20, pp. 14095–14107.
Ferrari, A.C. and Robertson, J., Phys. Rev. B, 2001, vol. 64, no. 7, p. 075414.
Maultzsch, J., Reich, S., and Thomsen, C., Phys. Rev. B, 2004, vol. 70, no. 15, p. 155403.
Chu, P.K. and Li, L.H., Mater. Chem. Phys., 2006, vol. 96, nos. 2–3, pp. 253–277.
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © A.I. Abdulagatov, Kr.N. Ashurbekova, Ka.N. Ashurbekova, R.R. Amashaev, M.Kh. Rabadanov, I.M. Abdulagatov, 2018, published in Zhurnal Prikladnoi Khimii, 2018, Vol. 91, No. 3, pp. 305−318.
Rights and permissions
About this article
Cite this article
Abdulagatov, A.I., Ashurbekova, K.N., Ashurbekova, K.N. et al. Molecular Layer Deposition and Thermal Transformations of Titanium(Aluminum)-Vanadium Hybrid Organic-Inorganic Films. Russ J Appl Chem 91, 347–359 (2018). https://doi.org/10.1134/S1070427218030011
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1070427218030011