Abstract
The vanadium pentoxide (V2O5) films were deposited on silicon wafer by DC magnetron sputtering. By Raman scattering measurements, the microstructure properties of the V2O5 films prepared with different O2–Ar gas flow ratios and annealed at different temperatures were studied, respectively. The results revealed that the increase of O2–Ar gas flow ratio during sputtering was of advantage to prepare the V2O5 film with desired layer structure. A high post-annealing temperature (below 500 °C) induced the crystallization and the formation of the integrated structure of V2O5 film. However, it was found that both intensities of Raman scattering peaks at 146 cm−1 and 994 cm−1, respectively, decreased for samples annealed at a temperature of 550 °C. The peak at 146 cm−1 was attributed to skeleton bent vibration and that at 994 cm−1 was due to the stretching vibration of vanadyl V=OA bond. It showed that the high-temperature annealing was believed to have distorted the microstructure of V2O5 films. The oxygen vacancies were, therefore, induced, which benefited the formation of V-OA-V bonds between layers. The result of X-ray diffraction measurements was in good agreement with that of Raman scattering spectra.
Similar content being viewed by others
References
Levy M, Duclot MJ, Rousseau F (1989) J Power Sources 26:381
Singhal A, Skandan G, Amatucci G, Badway F, Ye N, Manthiram A, Ye H, Xu JJ (2004) J Power Sources 129:38
Suzuki S, Hibino M, Miyayama M (2003) J Power Sources 124:513
Novák P, Scheifele W, Haas O (1995) J Power Sources 54:479
Aurbach D, Gofer Y, Lu Z, Schechter A, Chusid O, Gizbar H, Cohen Y, Ashkenazi V, Moshkovich M, Turgeman R, Levi E (2001) J Power Sources 28:97–98
Yu L, Zhang XG (2004) Journal of Colloid and Interface Science 278:160
Rocquefelte X, Boucher F, Gressier P, Ouvrard G (2003) Chem Mater 15:1812
Ganduglia-Pirovano MV, Sauer J (2004) Phys Rev B 70:045422
Ganduglia-Pirovano MV, Sauer J (2005) J Phys Chem B 109:375
Abello L, Husson E, Repelin Y, Lucazeau G (1983) Spectrochimica Acta 39A (7):641
Ramana CV, Smith RJ, Hussian OM, Massot M, Julien CM (2005) Surf Interface Anal 37:406
Rajendra Kumar RT, Karunagaran B, Venkatachalam S, Mangalaraj D, Narayandass Sa K, Kesavamoorthy R (2003) Materials Letters 57:3820
Rajendra Kumar RT, Karunagaran B, Senthil Kumar V, Jeyachandran TL, Mangalaraj D, Narayandass Sa K (2003) Materials Science in Semiconductor Processing 6:543
Petrov GI, Yakovlev VV (2002) Appl Phys Lett (816):1023
Repelin Y, Husson E, Abello L, Lucazeau G (1985) Spectrochimica Acta 41A (8):993
Acknowledgements
This work was supported by the National Natural Science Foundation of China (Grant No. 50402024) and Natural Science Foundation of Gansu Province (Grant No. zs 041-A25–033).
Author information
Authors and Affiliations
Corresponding author
Additional information
Contribution to ICMAT 2007, Symposium K: Nanostructured and bulk materials for electrochemical power sources, July 1-6, 2007, Singapore
Rights and permissions
About this article
Cite this article
Su, Q., Liu, X.Q., Ma, H.L. et al. Raman spectroscopic characterization of the microstructure of V2O5 films. J Solid State Electrochem 12, 919–923 (2008). https://doi.org/10.1007/s10008-008-0515-5
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10008-008-0515-5