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Aluminum hydroxocarboxylates in solution deposition of planarization alumina films

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Abstract

Aluminum hydroxocarboxylates derived from butyric, pivalic, valeric, and isovaleric acids were synthesized and characterized. The synthesized hydroxocarboxylates were suspended in isopropanol and reacted with diethylenetriamine and monoethanolamine, which acted as hydrolyzing and complex-forming agents, to obtain precursor solutions for chemical deposition of smooth amorphous alumina films on metal substrates.

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Authors and Affiliations

  1. Lomonosov Moscow State University, Moscow, 119991, Russia

    D. M. Tsymbarenko, I. A. Martynova, N. V. Ryzhkov & N. P. Kuz’mina

Authors
  1. D. M. Tsymbarenko
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  2. I. A. Martynova
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  3. N. V. Ryzhkov
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  4. N. P. Kuz’mina
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Corresponding author

Correspondence to D. M. Tsymbarenko.

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Original Russian Text © D.M. Tsymbarenko, I.A. Martynova, N.V. Ryzhkov, N.P. Kuz’mina, 2017, published in Zhurnal Obshchei Khimii, 2017, Vol. 87, No. 6, pp. 989–997.

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Tsymbarenko, D.M., Martynova, I.A., Ryzhkov, N.V. et al. Aluminum hydroxocarboxylates in solution deposition of planarization alumina films. Russ J Gen Chem 87, 1209–1216 (2017). https://doi.org/10.1134/S1070363217060172

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  • DOI: https://doi.org/10.1134/S1070363217060172

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