Abstract
The high-resolution X-ray diffraction technique, Raman spectroscopy, and photoluminescence spectroscopy are used to study the structural, optical, and electron energy properties of epitaxial Al x Ga1 − x As1 − y P y :Mg alloy films grown by metal-organic chemical vapor deposition (MOCVD). It is shown that the introduction of a Mg impurity into the quaternary alloy provides high charge-carrier concentrations. A decrease in the growth temperature yields a decrease in the charge-carrier concentration in films doped with magnesium at a small gas-carrier flux of the acceptor impurity, whereas an increase in the flux results in an increase in the acceptor-impurity concentration, which is reflected in the character of the photoluminescence spectra.
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Original Russian Text © P.V. Seredin, A.S. Lenshin, A.V. Glotov, I.N. Arsentyev, D.A. Vinokurov, I.S. Tarasov, T. Prutskij, H. Leiste, M. Rinke, 2014, published in Fizika i Tekhnika Poluprovodnikov, 2014, Vol. 48, No. 8, pp. 1123–1131.
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Seredin, P.V., Lenshin, A.S., Glotov, A.V. et al. Structural and optical properties of heavily doped Al x Ga1 − x As1 − y P y :Mg alloys produced by metal-organic chemical vapor deposition. Semiconductors 48, 1094–1102 (2014). https://doi.org/10.1134/S1063782614080211
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DOI: https://doi.org/10.1134/S1063782614080211