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Study of postgrowth processing in the fabrication of quantum-cascade lasers

  • Fabrication, Treatment, and Testing of Materials and Structures
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Abstract

The special postgrowth processing of structures for quantum-cascade lasers is studied. The processing includes regrowth with a high-resistivity material (indium phosphide) with a carrier concentration of n ≈ 5 × 1010 cm−3, photolithography with various wet chemical etchants, and the fabrication of special contacts providing enhanced heat removal. The use of modified postgrowth processing provides necessary parameters satisfying requirements for high-quality devices.

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Authors and Affiliations

  1. Ioffe Physical-Technical Institute, Russian Academy of Sciences, St. Petersburg, 194021, Russia

    V. V. Mamutin, N. D. Ilyinskaya, D. A. Bedarev, R. V. Levin & B. V. Pushnyi

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  1. V. V. Mamutin
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  2. N. D. Ilyinskaya
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  3. D. A. Bedarev
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  4. R. V. Levin
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  5. B. V. Pushnyi
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Correspondence to V. V. Mamutin.

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Original Russian Text © V.V. Mamutin, N.D. Ilyinskaya, D.A. Bedarev, R.V. Levin, B.V. Pushnyi, 2014, published in Fizika i Tekhnika Poluprovodnikov, 2014, Vol. 48, No. 8, pp. 1132–1137.

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Mamutin, V.V., Ilyinskaya, N.D., Bedarev, D.A. et al. Study of postgrowth processing in the fabrication of quantum-cascade lasers. Semiconductors 48, 1103–1108 (2014). https://doi.org/10.1134/S1063782614080181

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  • DOI: https://doi.org/10.1134/S1063782614080181

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