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Multiperiod quantum-cascade nanoheterostructures: Epitaxy and diagnostics

  • Semiconductor Structures, Low-Dimensional Systems, and Quantum Phenomena
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Abstract

Advances in the production technology of multiperiod nanoheterostructures of quantum-cascade lasers with 60 cascades by molecular-beam epitaxy (MBE) on an industrial multiple-substrate MBE machine are discussed. The results obtained in studying the nanoheterostructures of quantum-cascade lasers by transmission electron microscopy, high-resolution X-ray diffraction analysis, and photoluminescence mapping are presented.

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Authors and Affiliations

  1. St. Petersburg Academic University, Nanotechnology Research and Education Center, Russian Academy of Sciences, St. Petersburg, 194021, Russia

    A. Yu. Egorov, P. N. Brunkov, E. V. Nikitina, E. V. Pirogov, M. S. Sobolev & A. A. Lazarenko

  2. Ioffe Physical-Technical Institute, Russian Academy of Sciences, St. Petersburg, 194021, Russia

    P. N. Brunkov, M. V. Baidakova, D. A. Kirilenko & S. G. Konnikov

Authors
  1. A. Yu. Egorov
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  2. P. N. Brunkov
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  3. E. V. Nikitina
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  4. E. V. Pirogov
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  5. M. S. Sobolev
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  6. A. A. Lazarenko
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  7. M. V. Baidakova
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  8. D. A. Kirilenko
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  9. S. G. Konnikov
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Corresponding author

Correspondence to A. Yu. Egorov.

Additional information

Original Russian Text © A.Yu. Egorov, P.N. Brunkov, E.V. Nikitina, E.V. Pirogov, M.S. Sobolev, A.A. Lazarenko, M.V. Baidakova, D.A. Kirilenko, S.G. Konnikov, 2014, published in Fizika i Tekhnika Poluprovodnikov, 2014, Vol. 48, No. 12, pp. 1640–1645.

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Egorov, A.Y., Brunkov, P.N., Nikitina, E.V. et al. Multiperiod quantum-cascade nanoheterostructures: Epitaxy and diagnostics. Semiconductors 48, 1600–1604 (2014). https://doi.org/10.1134/S1063782614120057

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  • DOI: https://doi.org/10.1134/S1063782614120057

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