Skip to main content
SpringerLink
Log in

X-ray diffraction characterization of epitaxial CVD diamond films with natural and isotopically modified compositions

  • Real Structure of Crystals
  • Published:
Crystallography Reports Aims and scope Submit manuscript

Abstract

Comparative investigations of homoepitaxial diamond films with natural and modified isotopic compositions, grown by chemical vapor deposition (CVD) on type-Ib diamond substrates, are carried out using double-crystal X-ray diffractometry and topography. The lattice mismatch between the substrate and film is precisely measured. A decrease in the lattice constant on the order of (Δa/a)relax ∼ (1.1–1.2) × 10–4 is recorded in isotopically modified 13С (99.96%) films. The critical thicknesses of pseudomorphic diamond films is calculated. A significant increase in the dislocation density due to the elastic stress relaxation is revealed by X-ray topography.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. J. W. Wandersande, Properties and Growth of Diamond (INSPEC IEE, London, 1994), p. 33.

    Google Scholar 

  2. Yu. Shvyd’ko, S. Stoupin, V. Blank, and S. Terentyev, Nat. Photonics 5, 539 (2011).

    Article  ADS  Google Scholar 

  3. R. S. Balmer, J. R. Brandon, S. L. Clewes, et al., J. Phys.: Condens. Matter 21, 364211 (2009).

    Google Scholar 

  4. A. Tallaire, J. Achar, F. Silva, et al., Comptes Rendus Phys. 14, 169 (2013).

    Article  ADS  Google Scholar 

  5. A. P. Bol’shakov, V. G. Ral’chenko, A. V. Pol’skii, et al., Prikl. Fiz. 6, 104 (2011).

    Google Scholar 

  6. T. R. Anthony and W. F. Banholzer, Diamond Relat. Mater. 1, 717 (1992).

    Article  ADS  Google Scholar 

  7. L. Wei, P. K. Kuo, R. L. Thomas, et al., Phys. Rev. Lett. 70 (24), 3764 (1993).

    Article  ADS  Google Scholar 

  8. H. A. Holloway, R. A. Hess, M. K. Tamor, et al., Phys. Rev. B 44, 7123 (1991).

    Article  ADS  Google Scholar 

  9. T. Yamanaka, S. Morimoto, and H. Kanda, Phys. Rev. B 49, 9341 (1994).

    Article  ADS  Google Scholar 

  10. E. Sozontov, L. X. Cao, A. Kazimirov, et al., Phys. Rev. Lett. 86, 5329 (2001).

    Article  ADS  Google Scholar 

  11. H. London, Z. Phys. Chem. 16, 302 (1958).

  12. A. P. Bolshakov, V. G. Ralchenko, V. Y. Yurov, et al., Diamond Relat. Mater. 62, 49 (2016).

    Article  ADS  Google Scholar 

  13. I. A. Prokhorov and B. G. Zakharov, Poverkhnost, No. 2, 106 (1999).

    Google Scholar 

  14. W. J. Bartels and W. Nijman, J. Cryst. Growth 44, 518 (1978).

    Article  ADS  Google Scholar 

  15. I. A. Prokhorov, V. G. Ralchenko, A. P. Bolshakov, et al., Crystallogr. Rep. 58 (7), 1010 (2013).

    Article  ADS  Google Scholar 

  16. J. Hornstra and W. J. Bartels, J. Cryst. Growth 44, 513 (1978).

  17. A. A. Kaminskii, V. G. Ral’chenko, A. P. Bol’shakov, and A. A. Khomich, Dokl. Phys. 60 (12), 529 (2015).

    Article  Google Scholar 

  18. J. W. Matthews, S. Mader, and T. B. Light, J. Appl. Phys. 41, 3800 (1970).

    Article  ADS  Google Scholar 

  19. I. A. Prokhorov and B. G. Zakharov, Kristallografiya 27 (2), 354 (1982).

    Google Scholar 

  20. J. P. Hirsh and I. Lothe, Theory of Dislocations (McGrow–Hill, New York, 1968).

    Google Scholar 

  21. N. Burle, B. Pichaud, N. Guelton, and R. G. Saint-Jacques, Thin Solid Films 260, 65 (1995).

    Article  ADS  Google Scholar 

  22. C. Malgrange, Acta Phys. Polonica 82 (1), 13 (1992).

    Article  MathSciNet  Google Scholar 

  23. H. Watanabe, C. E. Nebel, and S. Shikata, Science 324, 1425 (2009).

    Article  ADS  Google Scholar 

  24. H. Watanabe and S. Shikata, Diamond Relat. Mater. 20, 980 (2011).

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Space Materials Science Laboratory, Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics”, Kaluga Branch, Russian Academy of Sciences, Kaluga, 248640, Russia

    I. A. Prokhorov

  2. Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics”, Russian Academy of Sciences, Moscow, 119333, Russia

    A. E. Voloshin

  3. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow, 119991, Russia

    V. G. Ralchenko, A. P. Bolshakov & A. A. Khomich

  4. National Research Nuclear University “MEPhI”, Moscow, 115409, Russia

    V. G. Ralchenko & A. P. Bolshakov

  5. Bauman Moscow State Technical University, Kaluga Branch, Kaluga, 248000, Russia

    D. A. Romanov

  6. Institute of Radio Engineering and Electronics, Fryazino Branch, Russian Academy of Sciences, Fryazino, Moscow oblast, 141190, Russia

    A. A. Khomich

  7. National Research Centre “Kurchatov Institute”, Moscow, 123182, Russia

    E. A. Sozontov

Authors
  1. I. A. Prokhorov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. E. Voloshin
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. V. G. Ralchenko
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. P. Bolshakov
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. D. A. Romanov
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. A. A. Khomich
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. E. A. Sozontov
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to I. A. Prokhorov.

Additional information

Original Russian Text © I.A. Prokhorov, A.E. Voloshin, V.G. Ralchenko, A.P. Bolshakov, D.A. Romanov, A.A. Khomich, E.A. Sozontov, 2016, published in Kristallografiya, 2016, Vol. 61, No. 6, pp. 945–952.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Prokhorov, I.A., Voloshin, A.E., Ralchenko, V.G. et al. X-ray diffraction characterization of epitaxial CVD diamond films with natural and isotopically modified compositions. Crystallogr. Rep. 61, 979–986 (2016). https://doi.org/10.1134/S1063774516060122

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063774516060122

Search

Navigation