Abstract
The processes of plasma etching of stack layers to form a structure of a metal gate of a nanoscale transistor with a dielectric with a high level of dielectric permittivity (HkMG) are investigated. A resist mask formed by fine-resolution electron-beam lithography is used in the etching. The plasma etching of the stack’s layers is carried out in one technological etching cycle without a vacuum break. The sequential anisotropic etching process of the stack of polysilicon, tantalum nitride, and hafnium nitride, as well as the etching process of the gate insulator based on hafnium oxide with a high degree of selectivity in relation to the underlying crystalline silicon, which guarantees the complete removal of the layer of hafnium oxide and the minimal loss of the silicon layer (not more than 0.5 nm), is investigated.
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Rudenko, K.V., Myakon’kikh, A.V., Rogozhin, A.E., Gushchin, O.P., and Gvozdev, V.A., Atomic layer deposition in the production of a gate HkMG stack structure with a minimum topological size of 32 nm. Russ. Microelectron., 2018, vol. 47, no. 1, pp. 1–10.
Frank, M.M., High-k/metal gate innovations enabling continued CMOS scaling, in Proceedings of the European Solid-State Device Research Conference ESSDERC, 2011, pp. 25–33.
Nam, S.-W., Rooks, M.J., Yang, J.K.W., et al., Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer. J. Vac. Technol. B, 2009, vol. 27, no. 6, p. 2622.
Myakon’kikh, A.V., Orlikovskii, N.A., Rogozhin, A.E., Rudenko, K.V., and Tatarintsev, A.A., Dependence of the resistance of the negative e-beam resist HSQ versus the dose in the RIE and wet etching processes. Russ. Microelectron., 2018, vol. 47, no. 3, pp. 157–165.
Shamiryan, D. et al., TaN metal gate etch mechanisms in BCl3-based plasmas. J. Vac. Sci. Technol., A, 2010, vol. 28, no. 2, p. 302.
Kitagawa, T. et al., Etching of high-k dielectric HfO2 films in BCl3-containing plasmas enhanced with O2 addition. Jpn. J. Appl. Phys., 2006, vol. 45, no. 10, pp. L297–L300.
Shamiryan, D., Baklanov, M., Claes, M., et al., Selective removal of high-k gate dielectrics. Chem. Eng. Commun., 2009, vol. 196, no. 12, p. 1475.
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Original Russian Text © A.V. Myakonkikh, K.Yu. Kuvaev, A.A. Tatarintsev, N.A. Orlikovskii, K.V. Rudenko, O.P. Guschin, E.S. Gornev, 2018, published in Mikroelektronika, 2018, Vol. 47, No. 5.
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Myakonkikh, A.V., Kuvaev, K.Y., Tatarintsev, A.A. et al. Investigation of the Process of Plasma Through Etching of HkMG Stack of Nanotransistor with a 32-nm Critical Dimension. Russ Microelectron 47, 323–331 (2018). https://doi.org/10.1134/S1063739718050062
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DOI: https://doi.org/10.1134/S1063739718050062