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Precision aspherization of the surface of optical elements by ion-beam etching

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Abstract

Ion-beam methods are developed for forming supersmooth aspherical optical surfaces of polished fused quartz with a precision on the level of 3 nm relative to the standard deviation and 0.2–0.3 nm for the mean-square surface roughness in the range of spatial frequencies of 0.01–100 μm−1.

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Authors and Affiliations

  1. Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, 603950, Russia

    M. V. Zorina, I. M. Nefedov, A. E. Pestov, N. N. Salashchenko, S. A. Churin & N. I. Chkhalo

  2. Lobachevsky State University of Nizhny Novgorod, pr. Gagarina 23, Nizhny Novgorod, 603950, Russia

    I. M. Nefedov, A. E. Pestov & S. A. Churin

Authors
  1. M. V. Zorina
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  2. I. M. Nefedov
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  3. A. E. Pestov
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  4. N. N. Salashchenko
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  5. S. A. Churin
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  6. N. I. Chkhalo
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Corresponding author

Correspondence to A. E. Pestov.

Additional information

Original Russian Text © M.V. Zorina, I.M. Nefedov, A.E. Pestov, N.N. Salashchenko, S.A. Churin, N.I. Chkhalo, 2015, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2015, No. 8, pp. 9–15.

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Zorina, M.V., Nefedov, I.M., Pestov, A.E. et al. Precision aspherization of the surface of optical elements by ion-beam etching. J. Surf. Investig. 9, 765–770 (2015). https://doi.org/10.1134/S1027451015040394

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  • DOI: https://doi.org/10.1134/S1027451015040394

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