Abstract
Nanofilms have been grown on InP in the presence of V2O5 introduced into the system by different procedures and methods (within one procedure) and their thickness has been determined by spectral ellipsometry. The phase composition of the films has been determined by X-ray diffraction, and their surface morphology and structure have been analyzed by atomic force microscopy and transmission electron microscopy. The characteristics of the films have been shown to depend on the procedure (through the gas phase in the course of oxidation or by deposition on the surface before oxidation) and method (magnetron sputtering or deposition from gel) used to introduce the chemical stimulator into the system.
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References
Beke, S., A review of the growth of V2O5 films from 1885 to 2010, Thin Solid Films, 2011, vol. 519, pp. 1761–1771.
Ramanathan, Sh., Thin Film Metal-Oxides: Fundamentals and Applications in Electronics and Energy, Springer Science + Business Media, 2010, p. 337.
Mittova, I.Ya., Influence of the physicochemical nature of chemical stimulators and the way they are introduced into a system on the mechanism of the thermal oxidation of GaAs and InP, Inorg. Mater, 2014, vol. 50, no. 9, pp. 874–881.
Mittova, I.Ya., Tomina, E.V., Lapenko, A.A., and Sladkopevtsev, B.V., Thermal oxidation of AIIIBV semiconductors with V2O5 nanolayers on the surface, Glass Phys. Chem., 2011, vol. 37, no. 2, pp. 230–234.
Mittova, I.Ya., Tomina, E.V., Lapenko, A.A., and Sladkopevtsev, B.V., Synthesis and catalytic performance of V2O5 nanoislands produced on the surface of InP crystals by electroexplosion, Inorg. Mater, 2010, vol. 46, no. 4, pp. 383–388.
Sladkopevtsev, B.V., Mittova, I.Ya., Tomina, E.V., and Burtseva, N.A., Growth of vanadium oxide films on InP under mild conditions and thermal oxidation of the resultant structures, Inorg. Mater, 2012, vol. 48, no. 2, pp. 161–168.
Livage, J., Vanadium pentoxide gels, Chem. Mater., 1991, vol. 3, no. 4, pp. 578–593.
Spesivtsev, E.V., Rykhlitskii, S.V., and Shvets, V.A., Advances in optical ellipsometry methods and instruments at the Institute of Semiconductor Physics, Avtometriya, 2011, vol. 47, no. 5, pp. 5–12.
Mittova, I.Ya., Tomina, E.V., Sladkopevtsev, B.V., Tretyakov, N.N., Lapenko, A.A., and Shvets, V.A., High-speed determination of the thickness and spectral ellipsometry investigation of films produced by the thermal oxidation of InP and VxOy/InP structures, Inorg. Mater, 2013, vol. 49, no. 2, pp. 179–184.
Diffraction Data. Catalog v. 2.4, International Center for Diffraction Data. http://www.icdd.com/translation/rus/pdf2.htm. Cited August 17, 2010.
Ievlev, V.M., Mittova, I.Ya., Samsonov, A.A., Tomina, E.V., and Kashkarov, V.M., Catalytic effect of a nanolayer of the (V2O5 + PbO) composite in the thermal oxidation of InP crystal, Dokl. Chem., 2007, vol. 417, no. 2, pp. 277–281.
Sladkopevtcev, B.V., Tretyakov, N.N., Dontsov, A.I., Tomina, E.V., and Mittova, I.Ya., Effect of oxide composition (V2O5 + Al2O3) via gas phase on the thermal oxidation of InP, Nanosyst. Phys., Chem., Math., 2013, vol. 4, no. 2, pp. 260–268.
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Original Russian Text © N.N. Tretyakov, I.Ya. Mittova, B.V. Sladkopevtsev, B.L. Agapov, D.I. Pelipenko, S.V. Mironenko, 2015, published in Neorganicheskie Materialy, 2015, Vol. 51, No. 7, pp. 719–725.
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Tretyakov, N.N., Mittova, I.Y., Sladkopevtsev, B.V. et al. Surface morphology, composition, and structure of nanofilms grown on InP in the presence of V2O5 . Inorg Mater 51, 655–660 (2015). https://doi.org/10.1134/S002016851507016X
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DOI: https://doi.org/10.1134/S002016851507016X