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Dielectric characteristics of a barium titanate film deposited by Nano Particle Deposition System (NPDS)

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Abstract

Barium Titanate (BaTiO3, BT) layers were deposited using Nano Particle Deposition System (NPDS). NPDS is a type of Aerosol Deposition Method (ADM), dry deposition approach that simplifies the process of depositing a BaTiO3 layer because it eliminates the need for solvents or binder. In this study, a BaTiO3 dielectric layer was deposited using NPDS, and its dielectric properties and microstructure were characterized. Polarization-electric field (P-E) hysteresis analysis was used to characterize the resulting metalinsulator-metal (MIM) capacitor structure, and the capacitance value and leakage current were measured. The BaTiO3 dielectric layer had a thickness of 5 μm and a high dielectric constant of 1300 without heat treatment, while maintaining high crystallinity after deposition. A high capacitance value of 228 nF/cm2 was obtained. This work demonstrated the use of ADM for fabricating a capacitor structure.

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References

  1. Park, K. I., Xu, S., Liu, Y., Hwang, G. T., Kang, S. J. L., et al., “Piezoelectric BaTiO3 Thin Film Nanogenerator on Plastic Substrates,” Nano Letters, Vol. 10, No. 12, pp. 4939–4943, 2010.

    Article  Google Scholar 

  2. Park, K. I., Lee, M., Liu, Y., Moon, S., Hwang, G. T., et al., “Flexible Nanocomposite Generator made of BaTiO3 Nanoparticles and Graphitic Carbons,” Advanced Materials, Vol. 24, No. 22, pp. 2999–3004, 2012.

    Article  Google Scholar 

  3. Yoon, S. G. and Safari, A., “(Ba0.5, Sr0.5)TiO3 Thin Film Preparation by RF Magnetron Sputtering and Its Electric Properties,” Thin Solid Films, Vol. 254, No. 1, pp. 211–215, 1995.

    Article  Google Scholar 

  4. Lee, G., Yoshimoto, M., Ohnishi, T., Sasaki, K., and Koinuma, H., “Epitaxial BaTiO3 Thin Films Grown in Unit-Cell Layer-by-Layer Mode by Laser Molecular Beam Epitaxy,” Materials Science and Engineering: B, Vol. 56, No. 2, pp. 213–217, 1998.

    Article  Google Scholar 

  5. Tabata, H., Ueda, K., and Kawai, T., “Construction of Ferroelectric and/or Ferromagnetic Superlattices by Laser MBE and their Physical Properties,” Materials Science and Engineering: B, Vol. 56, No. 2, pp. 140–146, 1998.

    Article  Google Scholar 

  6. Zeng, J., Wang, H., Wang, M., Shang, S., Wang, Z., and Lin, C., “Preparation and Ferroelectric Properties of BaTiO3 Thin Films by Atmospheric-Pressure Metalorganic Chemical Vapor Deposition,” Thin Solid Films, Vol. 322, No. 1, pp. 104–107, 1998.

    Article  Google Scholar 

  7. Sharma, H. B., Sarma, H., and Mansingh, A., “Fatigue in Sol-Gel Derived Barium Titanate Films,” Journal of Applied Physics, Vol. 85, No. 1, pp. 341–346, 1999.

    Article  Google Scholar 

  8. Xu, H., Zhu, H., Hashimoto, K., Kiyomoto, T., Mukaigawa, T., et al., “Preparation of BST Ferroelectric Thin Film by Pulsed Laser Ablation for Dielectric Bolometers,” Vacuum, Vol. 59, No. 2, pp. 628–634, 2000.

    Article  Google Scholar 

  9. Yoo, D. C. and Lee, J. Y., “Superlattice Formation of (Ba,Sr)TiO3 Prepared by Metal-Organic Chemical Vapor Deposition,” Materials Letters, Vol. 47, No. 4, pp. 258–261, 2001.

    Article  Google Scholar 

  10. Wei, Z., Xu, H., Noda, M., and Okuyama, M., “Preparation of BaxSr1-xTiO3 Thin Films with Seeding Layer by a Sol-Gel Method,” Journal of Crystal Growth, Vol. 237, pp. 443–447, 2002.

    Article  Google Scholar 

  11. Yao, K., Zhang, L., Yao, X., and Zhu, W., “Growth, Structure, and Morphology of Lead Titanate Crystallites in the Sol-Gel Derived Glass-Ceramics,” Materials Science and Engineering: B, Vol. 41, No. 3, pp. 322–328, 1996.

    Article  Google Scholar 

  12. Yao, K., Zhu, W., Zhang, L., and Yao, X., “Effects of Glass Elements on the Structural Evolution of in Situ Grown Ferroelectric Perovskite Crystals In Sol-Gel Derived Glass-Ceramics,” Journal of Materials Research, Vol. 12, No. 4, pp. 1131–1140, 1997.

    Article  Google Scholar 

  13. Kumazawa, H. and Masuda, K., “Fabrication of Barium Titanate Thin Films with a High Dielectric Constant by a Sol-Gel Technique,” Thin Solid Films, Vol. 353, No. 1, pp. 144–148, 1999.

    Article  Google Scholar 

  14. Wei, Z., Noda, M., and Okuyama, M., “A Very Low-Temperature Growth of BaTiO3 Thin Film by Hydrothermal Treatment Following Sol-Gel Coating at 200 Degree Celsius,” Integrated Ferroelectrics, Vol. 52, No. 1, pp. 111–118, 2003.

    Article  Google Scholar 

  15. Pang, X., Zhao, L., Han, W., Xin, X., and Lin, Z., “A General and Robust Strategy for the Synthesis of Nearly Monodisperse Colloidal Nanocrystals,” Nature Nanotechnology, Vol. 8, No. 6, pp. 426–431, 2013.

    Article  Google Scholar 

  16. Akedo, J., Ichiki, M., Kikuchi, K., and Maeda, R., “Jet Molding System for Realization of Three-Dimensional Micro-Structures,” Sensors and Actuators A: Physical, Vol. 69, No. 1, pp. 106–112, 1998.

    Article  Google Scholar 

  17. Ichiki, M., Akedo, J., Schroth, A., Maeda, R., and Ishikawa, Y., “Xray Diffraction and Scanning Electron Microscopy Observation of Lead Zirconate Titanate Thick Film Formed by Gas Deposition Method,” Japanese Journal of Applied Physics, Vol. 36, No. 9B, pp. 5815–5819, 1997.

    Article  Google Scholar 

  18. Akedo, J. and Lebedev, M., “Microstructure and Electrical Properties of Lead Zirconate Titanate (Pb(Zr52/Ti48)O3) Thick Films Deposited by Aerosol Deposition Method,” Japanese Journal of Applied Physics, Vol. 38, No. 9B, pp. 5397–5407, 1999.

    Article  Google Scholar 

  19. Akedo, J. and Lebedev, M., “Piezoelectric Properties and Poling Effect of Pb(Zr,Ti)O3 Thick Films Prepared for Microactuators by Aerosol Deposition,” Applied Physics Letters, Vol. 77, No. 11, pp. 1710–1712, 2000.

    Article  Google Scholar 

  20. Nakada, M., Ohashi, K., Lebedev, M., and Akedo, J., “Electro- Optical Properties of (Pb,La)(Zr,Ti)O3 Films Prepared by Aerosol Deposition Method,” Japanese Journal of Applied Physics, Vol. 42, No. 9B, pp. 5960–6962, 2003.

    Article  Google Scholar 

  21. Nakada, M., Ohashi, K., and Akedo, J., “Dielectric Characteristics of Ferroelectric Films Prepared by Aerosol Deposition in THz Range,” Japanese Journal of Applied Physics, Vol. 44, No. 9B, pp. 6918–6922, 2005.

    Article  Google Scholar 

  22. Oh, S. W., Akedo, J., Park, J. H., and Kawakami, Y., “Fabrication and Evaluation of Lead-Free Piezoelectric Ceramic LF4 Thick Film Deposited by Aerosol Deposition Method,” Japanese Journal of Applied Physics, Vol. 45, No. 9B, pp. 7465–7470, 2006.

    Article  Google Scholar 

  23. Hatono, H., Ito, T., Iwata, K., and Akedo, J., “Multilayer Construction with Various Ceramic Films for Electronic Devices Fabricated by Aerosol Deposition,” International Journal of Applied Ceramic Technology, Vol. 3, No. 6, pp. 419–427, 2006.

    Article  Google Scholar 

  24. Imanaka, Y., Hayashi, N., Takenouchi, M., and Akedo, J., “Aerosol Deposition for Post-LTCC,” Journal of the European Ceramic Society, Vol. 27, No. 8, pp. 2789–2795, 2007.

    Article  Google Scholar 

  25. Hatono, H., Ito, T., and Matsumura, A., “Application of BaTiO3 Film Deposited by Aerosol Deposition to Decoupling Capacitor,” Japanese Journal of Applied Physics, Vol. 46, No. 10B, pp. 6915–6919, 2007.

    Article  Google Scholar 

  26. Oh, J. M., Kim, N. H., Choi, S. C., and Nam, S. M., “Thickness Dependence of Dielectric Properties in BaTiO3 Films Fabricated by Aerosol Deposition Method,” Materials Science and Engineering: B, Vol. 161, No. 1, pp. 80–84, 2009.

    Article  Google Scholar 

  27. Oh, J. M. and Nam, S. M., “Possibility of BaTiO3 Thin Films Prepared on Cu Substrates for Embedded Decoupling Capacitors by an Aerosol Deposition Method,” Journal of Ceramic Processing Research, Vol. 10, No. 5, pp. 674–678, 2009.

    Google Scholar 

  28. Oh, S., Park, J. H., and Akedo, J., “Dielectric Characteristics of Barium Strontium Titanate Films Prepared by Aerosol Deposition on a Cu Substrate,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 56, No. 3, pp. 421–424, 2009.

    Article  Google Scholar 

  29. Hoshina, T., Furuta, T., Kigoshi, Y., Hatta, S., Horiuchi, N., et al., “Size effect of Nanograined BaTiO3 Ceramics Fabricated by Aerosol Deposition Method,” Japanese Journal of Applied Physics, Vol. 49, No. 9S, Paper No. 09MC02, 2010.

    Google Scholar 

  30. Suzuki, M. and Akedo, J., “Temperature Dependence of Dielectric Properties of Barium Titanate Ceramic Films Prepared by Aerosol Deposition Method,” Japanese Journal of Applied Physics, Vol. 49, No. 9S, Paper No. 09MA10, 2010.

    Google Scholar 

  31. Park, J. H., Kawakami, Y., Suzuki, M., and Akedo, J., “Fabrication and Characterization of Optical Micro-Electro-Mechanical System Scanning Devices Using BaTiO3-based Lead-Free Piezoelectric- Coated Substrate Sheet by Aerosol Deposition,” Japanese Journal of Applied Physics, Vol. 50, No. 9S2, Paper No. 09ND19, 2011.

    Google Scholar 

  32. Suzuki, M., Nishihara, Y., Uesu, Y., and Akedo, J., “Polarization Properties of Bismuth Strontium Tantalate Ceramic Films Deposited by Aerosol Deposition Method,” Japanese Journal of Applied Physics, Vol. 51, No. 9S1, Paper No. 09LA17, 2012.

    Google Scholar 

  33. Chung, S. O. and Lee, W. J., “Leakage Current Characteristics and Ferroelectric Properties of Lead Zirconate Titanate Films Deposited by Chemical Vapor Deposition,” Journal of Korean Metals and Materials, Vol. 38, No. 11, pp. 1559–1565, 2000.

    Google Scholar 

  34. Kim, I. J. and Bae, C. H., “Production of Smart Multilayer Film Composed of TiNi Shape Memory Alloy and PZT Ferroelectric Material,” Journal of the Korean Institute of Metals and Materials, Vol. 38, No. 1, pp. 1542–1546, 2000.

    Google Scholar 

  35. Cho, S. H. and Yoon, Y. J., “Multi-Layer TiO2 Films Prepared by Aerosol Deposition Method for Dye-Sensitized Solar Cells,” Thin Solid Films, Vol. 547, pp. 91–94, 2013.

    Article  Google Scholar 

  36. Chun, D. M., Kim, M. H., Lee, J. C., and Ahn, S. H., “A Nano-Particle Deposition System for Ceramic and Metal Coating at Room Temperature and Low Vacuum Conditions,” Int. J. Precis. Eng. Manuf., Vol. 9, No. 1, pp. 51–53, 2008.

    Google Scholar 

  37. Chun, D. M. and Ahn, S. H., “Deposition Mechanism of Dry Sprayed Ceramic Particles at Room Temperature using a Nano-Particle Deposition System,” Acta Materialia, Vol. 59, No. 7, pp. 2693–2703, 2011.

    Article  Google Scholar 

  38. Chun, D. M., Choi, J. O., Lee, C. S., and Ahn, S. H., “Effect of Stand-Off Distance for Cold Gas Spraying of Fine Ceramic Particles (< 5μm) under low Vacuum and Room Temperature using Nano- Particle Deposition System (NPDS),” Surface and Coatings Technology, Vol. 206, No. 8, pp. 2125–2132, 2012.

    Article  Google Scholar 

  39. Jung, K. B., Song, W. J., Chun, D. M., Yeo, J. C., Kim, M. S., et al., “Coating of Ni Powders through Micronozzle in a Nano Particle Deposition System,” Metals and Materials International, Vol. 16, No. 3, pp. 465–467, 2010.

    Article  Google Scholar 

  40. Kim, K. S., Lee, J., Kim, Y. H., and Lee, C. S., “Effect of Scanning Speed on Copper Line Deposition using Nanoparticle Deposition System (NPDS) for Direct Printing Technology,” Aerosol Science and Technology, Vol. 47, No. 1, pp. 106–113, 2013.

    Article  Google Scholar 

  41. Song, W., Jung, K., Chun, D.-M., Ahn, S. H., and Lee, C. S., “Deposition of Al2O3 Powders using Nano-Particle Deposition System,” Surface Review and Letters, Vol. 17, No. 2, pp. 189–193, 2010.

    Article  Google Scholar 

  42. Akedo, J., “Room Temperature Impact Consolidation (RTIC) of Fine Ceramic Powder by Aerosol Deposition Method and Applications to Microdevices,” Journal of Thermal Spray Technology, Vol. 17, No. 2, pp. 181–198, 2008.

    Article  Google Scholar 

  43. Eccyclopaedia Britannica, “Dielectric Constant,” http://global. britannica.com/EBchecked/topic/162637/dielectric-constant#ref216281 (Accessed 23 MAR 2015)

    Google Scholar 

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Authors and Affiliations

  1. Department of Materials Engineering, Hanyang University, 55, Hanyangdaehak-ro, Sangnok-gu, Ansan-si, Gyeonggi-do, 426-791, South Korea

    Seungkyu Yang, Hyungsub Kim, Rajendra Charandeo Pawar & Caroline Sunyong Lee

  2. School of Mechanical & Aerospace Engineering, Seoul National University, Gwanak-ro 599, Gwanak-gu, Seoul, 151-742, South Korea

    Sung-Hoon Ahn

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  1. Seungkyu Yang
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  5. Caroline Sunyong Lee
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Correspondence to Caroline Sunyong Lee.

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Yang, S., Kim, H., Pawar, R.C. et al. Dielectric characteristics of a barium titanate film deposited by Nano Particle Deposition System (NPDS). Int. J. Precis. Eng. Manuf. 16, 1029–1034 (2015). https://doi.org/10.1007/s12541-015-0133-y

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  • DOI: https://doi.org/10.1007/s12541-015-0133-y

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