Abstract
In this paper, the BaTiO3/Ni composite films of 10 μm were fabricated by Aerosol deposition. We investigate the dielectric behavior of BaTiO3/Ni composite films with various Ni contents. The BaTiO3/Ni composite film with Ni content of 9.1 vol% has high dielectric constant at 1 kHz (476) due to the percolation effect. This high dielectric constant was attributed to the microcapacitor structures and Maxwell–Wagner polarization. Although the BaTiO3/Ni composite film was fabricated at room temperature, it had a high dielectric constant of 8 times higher than that of raw BaTiO3 film, and showed a very low leakage current. Therefore, BaTiO3/Ni composite films fabricated by Aerosol deposition can potentially be used as embedded capacitors.
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Acknowledgments
This work was supported by a National Research Foundation of Korea (NRF) Grant funded by the Korean government (MSIP) No. 2014R1A1A2008529.
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Kim, J.H., Kim, HK., Lee, SH. et al. Dielectric properties of percolative BaTiO3/Ni composite film fabricated by aerosol deposition process. J Mater Sci: Mater Electron 27, 8567–8572 (2016). https://doi.org/10.1007/s10854-016-4874-x
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DOI: https://doi.org/10.1007/s10854-016-4874-x