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Influence of the Parameters of Middle Frequency Magnetron Sputtering on the Elemental Composition, Microstructure, and Mechanical Properties of Ti–Al–Ta–N Coatings

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The influence of the pulse frequency and duty cycle on the elemental composition, microstructure, and mechanical properties of Ti–Al–Ta–N coatings deposited by middle-frequency magnetron sputtering is studied. An increase in the pulse frequency and duty cycle is found to lead to a decrease in the deposition rate and sputtering yield as well as to variations of the coating composition. The coatings deposited at a pulse frequency of 50 kHz have a denser mixed microstructure, while those obtained at 100 kHz are characterized by pronounced columnar morphology. The hardness of the coatings slightly decreases with increasing duty cycle. Thus, the coatings with dense microstructure and maximum hardness are obtained at a pulse frequency of 50 kHz and a duty cycle of 60%.

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Authors and Affiliations

  1. Institute of Strength Physics and Materials Science of the Siberian Branch of the Russian Academy of Sciences, Tomsk, Russia

    A. R. Shugurov, Yu. A. Garanin & E. D. Kuzminov

Authors
  1. A. R. Shugurov
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  2. Yu. A. Garanin
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  3. E. D. Kuzminov
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Correspondence to A. R. Shugurov.

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Shugurov, A.R., Garanin, Y.A. & Kuzminov, E.D. Influence of the Parameters of Middle Frequency Magnetron Sputtering on the Elemental Composition, Microstructure, and Mechanical Properties of Ti–Al–Ta–N Coatings. Russ Phys J 67, 373–380 (2024). https://doi.org/10.1007/s11182-024-03133-0

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  • DOI: https://doi.org/10.1007/s11182-024-03133-0

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