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Effect of Applied Voltage on Localized Deposition of Silicon Dioxide-like Films on Stainless Steel Using Atmospheric Pressure Microplasma Jet

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Abstract

Atmospheric pressure plasma jet (APPJ) is a promising method for thin film deposition. In this work, an argon/oxygen/hexamethyldisiloxane APPJ is utilized to deposit SiO2-like thin film on a stainless steel surface, and then the optical, electrical, thermal, and particle properties of this APPJ are investigated by adjusting the applied voltage. Moreover, the surface morphology, thickness, roughness, element composition, and water contact angle properties of the deposited thin films are also studied. The results show that there are two filaments discharge states of the APPJ by increasing voltage, which are partial filaments discharge (PFD) state at 5.4 kV and uniform filaments discharge (UFD) state at 7.5 kV. The current pulses and plasma gas temperature in the UFD state are higher than in the PFD state. The dissipated power increases from 7.2 to 19.1 W with the applied voltage increases. And OH, O, and Si active particles are monitored in two discharge states of APPJ. Besides, the surface morphology of the deposited thin films is different in the two discharge states and the film thickness is 1.21 ± 0.19 μm and 1.55 ± 0.35 μm respectively. The XPS results show that the film is a SiO2-like film in which the Si/O ratio is 2.80 and 2.76 and contains three kinds of Si–O bonds and a high concentration of carbon (47% and 53%). Finally, the SiO2-like films deposited on the surface of stainless steel at two discharge states are hydrophobic and the water contact angles are 76.8° ± 5° and 90.3° ± 3° respectively. This work is helpful in the deposition of high-quality silicon-containing films on conductive substrates by APPJ.

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Data Availability

The datasets used and analysed during the current study are available from the corresponding author on reasonable request.

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Funding

This work is supported by the Fund of the National Natural Science Foundation of China (51905002), Anhui Provincial Natural Science Foundation (2008085QE230, 2108085ME174, 2108085QE228), Open Project of China International Science and Technology Cooperation Base on Intelligent Equipment Manufacturing in Special Service Environment (ISTC2022KF06), Open Project of the Key Laboratory of Green Fabrication and Surface Technology of Advanced Metal Materials (GFST2021KF06), Open Project of Anhui Province Engineering Laboratory of Intelligent Demolition Equipment (APELIDE2021B001), Graduate Student Scientific Research Project in Anhui Province (YJS20210345), and Postgraduate Academic Innova tion Project of Anhui Province (2022xscx068).

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Authors and Affiliations

  1. China International Science and Technology Cooperation Base On Intelligent Equipment Manufacturing in Special Service Environment, Ma’anshan, 243032, China

    Jiahao Wang, Tao Wang, Xin Wang, Weizhi Yang, Ziting Wang & Meng Li

  2. School of Mechanical Engineering, Anhui University of Technology, Ma’anshan, 243032, China

    Jiahao Wang, Tao Wang, Xin Wang, Weizhi Yang, Ziting Wang, Meng Li & Liping Shi

  3. Key Laboratory of Green Fabrication and Surface Technology of Advanced Metal Materials Ministry of Education, Anhui University of Technology, Ma’anshan, 243032, China

    Tao Wang & Meng Li

  4. Anhui Province Engineering Laboratory of Intelligent Demolition Equipment, Ma’anshan, 243032, China

    Tao Wang

  5. Wuhu Technology and Innovation Research Institute, AHUT, Wuhu, 241002, China

    Liping Shi

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  1. Jiahao Wang
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Contributions

JH: wrote the main manuscript text. TW: project administration. XW: visualization. WZ: validation. ZT: methodology. ML: resources. LP: conceptualization. All authors have read and approved the manuscript.

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Correspondence to Tao Wang.

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Wang, J., Wang, T., Wang, X. et al. Effect of Applied Voltage on Localized Deposition of Silicon Dioxide-like Films on Stainless Steel Using Atmospheric Pressure Microplasma Jet. Plasma Chem Plasma Process 43, 879–899 (2023). https://doi.org/10.1007/s11090-023-10332-z

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