Angle effect of ultrasonic agitation on the development of thick JSR THB-430N negative UV photoresist F.-G. TsengC.-S. Yu Pages: 363 - 367
Microfabrication of freedom and articulated alumina-based components S. MonneretC. ProvinS. Corbel Pages: 368 - 374
Modeling and controlling flow-induced suspension-head unit vibrations in hard disk drives J. A. C. HumphreyH. Haj-HaririL. Rosales Pages: 375 - 382
Nickel and copper electroplating of proton beam micromachined SU-8 resist J. A. van KanI. RajtaF. Watt Pages: 383 - 386
Performance and simulation of thermoplastic micro injection molding V. PiotterK. MuellerJ. Hausselt Pages: 387 - 390
3D electroplated microstructures fabricated by a novel height control method L.-W. PanP. YuenL. Lin Pages: 391 - 394
High aspect ratio meso-scale parts enabled by wire micro-EDM G. L. BenavidesL. F. BiegE. A. Bryce Pages: 395 - 401
Requirements of an industrially applicable microcutting process for steel micro-structures J. SchmidtD. SpathH. Tritschler Pages: 402 - 408
Effect of load/unload process on friction/stiction and durability of head-disk interface N. S. TambeB. Bhushan Pages: 409 - 418
Process development of precision surface micro-machining using mechanical abrasion and chemical etching J.-M. LeeI.-H. SungD.-E. Kim Pages: 419 - 426
A parametric study on rocking vibration of rotating disk/spindle systems with hydrodynamic bearings: rotating-shaft design J. S. ParkI. Y. ShenC.-P. Roger Ku Pages: 427 - 434