Abstract
In order to obtain three dimensional micro-objects, we developed a new microstereolithography apparatus based on the use of a dynamic mask generator which allows the manufacture of a complete layer by only one irradiation, the part being still layered. In order to improve the mechanical properties of the fabricated micro-objects and the resolution of the process, a mixture of alumina and photopolymer is used. By controlling the fabrication parameters, we present a movable microgimbal which has been realised in only one fabrication step.
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Received: 5 October 2001/Accepted: 26 November 2001
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Monneret, S., Provin, C., Le Gall, H. et al. Microfabrication of freedom and articulated alumina-based components. Microsystem Technologies 8, 368–374 (2002). https://doi.org/10.1007/s00542-002-0192-8
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DOI: https://doi.org/10.1007/s00542-002-0192-8