Recent developments in dimensional metrology for microsystem components S. CaoU. BrandS. Büttgenbach Pages: 3 - 6
High aspect ratio microstructures based on anisotropic porous materials F. MüllerA. BirnerV. Lehmann Pages: 7 - 9
Numerical simulation of a polysilicon thermal flexure actuator Y. KuangQ.-A. HuangN. K. S. Lee Pages: 17 - 21
Sub-micron coatings with low friction and wear for micro actuators R. BandorfH. LüthjeA. Wortmann Pages: 51 - 54
New plastification concepts for micro injection moulding W. MichaeliA. SpennemannR. Gärtner Pages: 55 - 57
A simple method for the characterization of thin films during heat treatment C. H. Pan Pages: 63 - 66
A single crystal silicon 3 dimensional processing technique with applications in large displacement electrostatic actuation K. SubramanianX. T. HuangN. C. MacDonald Pages: 67 - 72