1. Study on rapid micro-structuring using Jet molding – Present status and structuring properties toward HARMST

   • J. Akedo

   Pages: 205 - 209

2. Fabrication of sub-micron structures for MEMS using deep X-ray lithography

   • H. Ueno
   • Y. Zhang
   • S. Sugiyama

   Pages: 210 - 213

3. Electroplated compliant metal microactuators with small feature sizes using a removable SU-8 mould

   • R. K. Vestergaard
   • S. Bouwstra

   Pages: 214 - 217

4. High aspect ratio electrostatic micro actuators using LIGA process

   • R. Kondo
   • S. Takimoto
   • S. Sugiyama

   Pages: 218 - 221

5. Development toward an all-silicon integrated thermal management system: the integrated MCM

   • J. Pilchowski
   • A. D. Hölke
   • F. M. Gerner

   Pages: 222 - 228

6. Thermal optimization of a micro valve array

   • D. Haefliger
   • D. Baechi
   • R. Buser

   Pages: 229 - 234

7. LIGA fabrication and test of a DC type magnetohydrodynamic (MHD) micropump

   • L. Huang
   • W. Wang
   • Z.-G. Ling

   Pages: 235 - 240

8. Micro flame spectrometer

   • S. Zimmermann
   • J. Müller

   Pages: 241 - 245