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Study on rapid micro-structuring using Jet molding – Present status and structuring properties toward HARMST

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Abstract

Ultra-fine particles of metal and ceramic materials jetting with the velocities of several hundreds m/s is accumulated on the substrate based on impact adhesion. Recently, the application of this phenomenon for micro electro mechanical systems and micro devise has been investigated. In this paper, the deposition method based on ultra-fine particle beam and possibilities of its application as HARMST are reported.

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  1. Mechanical Engineering Laboratory, Ministry of International Trade and Industry, 1-2 Namiki, Tsukuba, Ibaraki, 305-8564, Japan e-mail: akedo@mel.go.jp, , , , , , JP

    J. Akedo

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  1. J. Akedo
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Akedo, J. Study on rapid micro-structuring using Jet molding – Present status and structuring properties toward HARMST. Microsystem Technologies 6, 205–209 (2000). https://doi.org/10.1007/s005420000055

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  • DOI: https://doi.org/10.1007/s005420000055

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